//----- [#USER CONTROL OPTIONS] ----- // for v2008.1 and more advanced // //1. [#DEFINE $XCAL_EXCL_PROF_diffcap]: turn off diff_cap profile. // [//#DEFINE $XCAL_EXCL_PROF_diffcap]: turn on diff_cap profile. // //2. [#DEFINE $XCAL_EXCL_INDIE]: turn off indie model // [//#DEFINE $XCAL_EXCL_INDIE]: turn on indie model // Turn off Width/Rho/Thickness indie variation to classic or no-indie model is only for // speeding up performance before the final design. // //******************************************************************** //Via Model control section //******************************************************************** //PEX VIA CAPACITANCE NO //******************************************************************** //General control section //******************************************************************** //#DEFINE $XCAL_EXCL_PROF_diffcap //#DEFINE $XCAL_EXCL_INDIE // // Generated on Mon Jan 18 05:33:19 2010 by xCalibrate v2008.3_34.23 Fri Oct 3 09:43:14 PDT 2008 // // Comments: //----- [# USER CONTROL OPTIONS] ----- // UNIT CAPACITANCE ff // UNIT INDUCTANCE ph //PEX VIA CAPACITANCE YES // 'YES' (or omitting statement) turns on extraction of all vias and contacts - some test structures require 'NO' // LAYER INFORMATION use 'PEX ALIAS cal_layer lvs_layer' to map conductor (not contact/via) names, where cal_layer is conductor layer from this calibration and lvs_layer is layer from LVS connectivity extraction // Layer names are case-insensitive so it is not necessary to use PEX ALIAS to map case differences // Also, when mapping with 'PEX ALIAS' you still need connectivity for all aliased conductor cal_layers. You may need to create a dummy cal_layer in the LVS section // poly conductor layer must have connectivity and be in CAPACITANCE ORDER statement // gate shield layer must have connectivity and be in CAPACITANCE ORDER statement // metal1 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal2 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal3 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal4 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal5 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal6 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal7 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal8 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal9 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // metal10 conductor layer must have connectivity and be in CAPACITANCE ORDER statement // tndiff source/drain layer must have connectivity and be in CAPACITANCE ORDER statement // tpdiff source/drain layer must have connectivity and be in CAPACITANCE ORDER statement // polyCont via layer must connect poly and metal1 // via1 via layer must connect metal1 and metal2 // via2 via layer must connect metal2 and metal3 // via3 via layer must connect metal3 and metal4 // via4 via layer must connect metal4 and metal5 // via5 via layer must connect metal5 and metal6 // via6 via layer must connect metal6 and metal7 // via7 via layer must connect metal7 and metal8 // via8 via layer must connect metal8 and metal9 // via9 via layer must connect metal9 and metal10 // odCont via layer must connect diff and metal1 // PROFILE INFORMATION // #define $XCAL_EXCL_PROF_active // define this to remove diffusion to metal coupling or set XCAL_EXCL_PROF_active environment variable beforehand // #define $XCAL_INCL_PROF_diffcap_nb1 // define this to include diffusion to diffusion coupling or set XCAL_INCL_PROF_diffcap_nb1 environment variable beforehand // #define $XCAL_INCL_PROF_diffcap_nb2 // define this to include diffusion to other conductor coupling or set XCAL_INCL_PROF_diffcap_nb2 environment variable beforehand // #define $XCAL_EXCL_INDIE // uncomment this line to switch off indie variation (widths, thicknesses, etc) // or set XCAL_EXCL_INDIE environment variable before invoking calibre // #define $XCAL_EXCL_gate_fringe // uncomment this line to switch off fringe table // or set XCAL_EXCL_gate_fringe environment variable before invoking calibre // MAX WINDOW SETTINGS uncomment 1 of the following definitions or set XCAL_MAXD_MODE environment variable beforehand // #define $XCAL_MAXD_MODE default // for typical layouts (default) // #define $XCAL_MAXD_MODE test // for test structures // #define $XCAL_MAXD_MODE asic // for ASIC style designs //----- [# END USER CONTROL OPTIONS] ----- // // // Technology name: crn65lp_1p09m+alrdl_6x1z1u_typical // Precision: 1000 // DBU Size: 1e-09 // DB Magnification: 1 // Capacitance Units: ff // Inductance Units: ph // Background Dielectric: 1 // #ifdef $XCALIBRATE_INCLUDE_PROFILE_diffcap SVRF MESSAGE "Warning: $XCALBRATE_INCLUDE_PROFILE_diffcap setting is obsolete and has no effect" #endif // ifdef $XCALIBRATE_INCLUDE_PROFILE_diffcap #ifdef $XCALIBRATE_MAXD_MODE SVRF ERROR "Error: $XCALBRATE_MAXD_MODE setting is obsolete" #endif // ifdef $XCALIBRATE_MAXD_MODE #ifdef $XCAL_MAXD_MODE smart SVRF ERROR "Error: $XCAL_MAXD_MODE setting 'smart' is obsolete" #endif // ifdef $XCAL_MAXD_MODE smart #ifdef $XCAL_MAXD_MODE classic SVRF ERROR "Error: $XCAL_MAXD_MODE setting 'classic' is obsolete" #endif // ifdef $XCAL_MAXD_MODE classic #ifdef $XCAL_MAXD_MODE maximum SVRF ERROR "Error: $XCAL_MAXD_MODE setting 'maximum' is obsolete" #endif // ifdef $XCAL_MAXD_MODE maximum #ifndef $XCAL_MAXD_MODE #define $XCAL_MAXD_MODE default // set max_distance type unless already set from shell" #endif // ifndef $XCAL_MAXD_MODE #ifdef $XCAL_MAXD_MODE default VARIABLE MAXDISTANCE_poly 0.709005 VARIABLE MAXWIDTH_poly 0.3 VARIABLE MAXENCLOSE_poly 0.709005 VARIABLE MAXRADIUS_poly 210 VARIABLE MAXDISTANCE_metal1 1.32717 VARIABLE MAXWIDTH_metal1 0.45 VARIABLE MAXENCLOSE_metal1 1.32717 VARIABLE MAXRADIUS_metal1 385 VARIABLE MAXDISTANCE_metal2 1.48665 VARIABLE MAXWIDTH_metal2 0.5 VARIABLE MAXENCLOSE_metal2 1.48665 VARIABLE MAXRADIUS_metal2 582.5 VARIABLE MAXDISTANCE_metal3 2.26377 VARIABLE MAXWIDTH_metal3 0.5 VARIABLE MAXENCLOSE_metal3 2.26377 VARIABLE MAXRADIUS_metal3 780 VARIABLE MAXDISTANCE_metal4 2.80341 VARIABLE MAXWIDTH_metal4 0.5 VARIABLE MAXENCLOSE_metal4 2.80341 VARIABLE MAXRADIUS_metal4 977.5 VARIABLE MAXDISTANCE_metal5 2.89165 VARIABLE MAXWIDTH_metal5 0.5 VARIABLE MAXENCLOSE_metal5 2.89165 VARIABLE MAXRADIUS_metal5 1175 VARIABLE MAXDISTANCE_metal6 2.89165 VARIABLE MAXWIDTH_metal6 0.5 VARIABLE MAXENCLOSE_metal6 2.89165 VARIABLE MAXRADIUS_metal6 1372.5 VARIABLE MAXDISTANCE_metal7 2.89165 VARIABLE MAXWIDTH_metal7 0.5 VARIABLE MAXENCLOSE_metal7 2.89165 VARIABLE MAXRADIUS_metal7 1570 VARIABLE MAXDISTANCE_metal8 4.39037 VARIABLE MAXWIDTH_metal8 2 VARIABLE MAXENCLOSE_metal8 4.39037 VARIABLE MAXRADIUS_metal8 2317.5 VARIABLE MAXDISTANCE_metal9 8.96089 VARIABLE MAXWIDTH_metal9 10 VARIABLE MAXENCLOSE_metal9 8.96089 VARIABLE MAXRADIUS_metal9 4387.5 VARIABLE MAXDISTANCE_metal10 12.2438 VARIABLE MAXWIDTH_metal10 15 VARIABLE MAXENCLOSE_metal10 12.2438 VARIABLE MAXRADIUS_metal10 5512.5 VARIABLE MAXDISTANCE_diff 0.469594 VARIABLE MAXWIDTH_diff 0.4 VARIABLE MAXENCLOSE_diff 0.469594 VARIABLE MAXRADIUS_diff 150 VARIABLE MAXDISTANCE_diff2 0.469594 VARIABLE MAXWIDTH_diff2 0.4 VARIABLE MAXENCLOSE_diff2 0.469594 VARIABLE MAXRADIUS_diff2 150 #endif // ifdef $XCAL_MAXD_MODE default #ifdef $XCAL_MAXD_MODE test VARIABLE MAXDISTANCE_poly 2.1 VARIABLE MAXWIDTH_poly 5 VARIABLE MAXENCLOSE_poly 2.1 VARIABLE MAXRADIUS_poly 210 VARIABLE MAXDISTANCE_metal1 3.85 VARIABLE MAXWIDTH_metal1 5 VARIABLE MAXENCLOSE_metal1 3.85 VARIABLE MAXRADIUS_metal1 385 VARIABLE MAXDISTANCE_metal2 5.825 VARIABLE MAXWIDTH_metal2 5 VARIABLE MAXENCLOSE_metal2 5.825 VARIABLE MAXRADIUS_metal2 582.5 VARIABLE MAXDISTANCE_metal3 7.8 VARIABLE MAXWIDTH_metal3 5 VARIABLE MAXENCLOSE_metal3 7.8 VARIABLE MAXRADIUS_metal3 780 VARIABLE MAXDISTANCE_metal4 9.775 VARIABLE MAXWIDTH_metal4 5 VARIABLE MAXENCLOSE_metal4 9.775 VARIABLE MAXRADIUS_metal4 977.5 VARIABLE MAXDISTANCE_metal5 11.75 VARIABLE MAXWIDTH_metal5 5 VARIABLE MAXENCLOSE_metal5 11.75 VARIABLE MAXRADIUS_metal5 1175 VARIABLE MAXDISTANCE_metal6 13.725 VARIABLE MAXWIDTH_metal6 5 VARIABLE MAXENCLOSE_metal6 13.725 VARIABLE MAXRADIUS_metal6 1372.5 VARIABLE MAXDISTANCE_metal7 15.7 VARIABLE MAXWIDTH_metal7 5 VARIABLE MAXENCLOSE_metal7 15.7 VARIABLE MAXRADIUS_metal7 1570 VARIABLE MAXDISTANCE_metal8 23.175 VARIABLE MAXWIDTH_metal8 5 VARIABLE MAXENCLOSE_metal8 23.175 VARIABLE MAXRADIUS_metal8 2317.5 VARIABLE MAXDISTANCE_metal9 43.875 VARIABLE MAXWIDTH_metal9 10 VARIABLE MAXENCLOSE_metal9 43.875 VARIABLE MAXRADIUS_metal9 4387.5 VARIABLE MAXDISTANCE_metal10 55.125 VARIABLE MAXWIDTH_metal10 15 VARIABLE MAXENCLOSE_metal10 55.125 VARIABLE MAXRADIUS_metal10 5512.5 VARIABLE MAXDISTANCE_diff 1.5 VARIABLE MAXWIDTH_diff 5 VARIABLE MAXENCLOSE_diff 1.5 VARIABLE MAXRADIUS_diff 150 VARIABLE MAXDISTANCE_diff2 1.5 VARIABLE MAXWIDTH_diff2 5 VARIABLE MAXENCLOSE_diff2 1.5 VARIABLE MAXRADIUS_diff2 150 #endif // ifdef $XCAL_MAXD_MODE test #ifdef $XCAL_MAXD_MODE asic VARIABLE MAXDISTANCE_poly 0.119373 VARIABLE MAXWIDTH_poly 0.12 VARIABLE MAXENCLOSE_poly 0.119373 VARIABLE MAXRADIUS_poly 210 VARIABLE MAXDISTANCE_metal1 0.739172 VARIABLE MAXWIDTH_metal1 0.18 VARIABLE MAXENCLOSE_metal1 0.739172 VARIABLE MAXRADIUS_metal1 385 VARIABLE MAXDISTANCE_metal2 1.24952 VARIABLE MAXWIDTH_metal2 0.2 VARIABLE MAXENCLOSE_metal2 1.24952 VARIABLE MAXRADIUS_metal2 582.5 VARIABLE MAXDISTANCE_metal3 1.33854 VARIABLE MAXWIDTH_metal3 0.2 VARIABLE MAXENCLOSE_metal3 1.33854 VARIABLE MAXRADIUS_metal3 780 VARIABLE MAXDISTANCE_metal4 1.33854 VARIABLE MAXWIDTH_metal4 0.2 VARIABLE MAXENCLOSE_metal4 1.33854 VARIABLE MAXRADIUS_metal4 977.5 VARIABLE MAXDISTANCE_metal5 1.33854 VARIABLE MAXWIDTH_metal5 0.2 VARIABLE MAXENCLOSE_metal5 1.33854 VARIABLE MAXRADIUS_metal5 1175 VARIABLE MAXDISTANCE_metal6 1.33854 VARIABLE MAXWIDTH_metal6 0.2 VARIABLE MAXENCLOSE_metal6 1.33854 VARIABLE MAXRADIUS_metal6 1372.5 VARIABLE MAXDISTANCE_metal7 1.33854 VARIABLE MAXWIDTH_metal7 0.2 VARIABLE MAXENCLOSE_metal7 1.33854 VARIABLE MAXRADIUS_metal7 1570 VARIABLE MAXDISTANCE_metal8 2.80192 VARIABLE MAXWIDTH_metal8 0.8 VARIABLE MAXENCLOSE_metal8 2.80192 VARIABLE MAXRADIUS_metal8 2317.5 VARIABLE MAXDISTANCE_metal9 7.37218 VARIABLE MAXWIDTH_metal9 4 VARIABLE MAXENCLOSE_metal9 7.37218 VARIABLE MAXRADIUS_metal9 4387.5 VARIABLE MAXDISTANCE_metal10 9.26487 VARIABLE MAXWIDTH_metal10 6 VARIABLE MAXENCLOSE_metal10 9.26487 VARIABLE MAXRADIUS_metal10 5512.5 VARIABLE MAXDISTANCE_diff 0.469594 VARIABLE MAXWIDTH_diff 0.16 VARIABLE MAXENCLOSE_diff 0.469594 VARIABLE MAXRADIUS_diff 150 VARIABLE MAXDISTANCE_diff2 0.469594 VARIABLE MAXWIDTH_diff2 0.16 VARIABLE MAXENCLOSE_diff2 0.469594 VARIABLE MAXRADIUS_diff2 150 #endif // ifdef $XCAL_MAXD_MODE asic VARIABLE EPS_ENC 0.01 VARIABLE m34RS 1 VARIABLE m36RS 0 VARIABLE m37RS 1 VARIABLE m33RS 0 VARIABLE m33NB_COEF 1 VARIABLE m33IN_COEF 1 VARIABLE m33IN0_COEF 1 VARIABLE m34NB_COEF 1 VARIABLE m34IN_COEF 1 VARIABLE m34IN0_COEF 1 VARIABLE m36NB_COEF 1 VARIABLE m36IN_COEF 1 VARIABLE m36IN0_COEF 1 VARIABLE m37NB_COEF 1 VARIABLE m37IN_COEF 1 VARIABLE m37IN0_COEF 1 // // Profile = field // // Layers = (field_base field_base_diel poly polyCont poly_diel poly_diel2 poly_diel3 poly_diel4 metal1 via1 metal1_diel metal1_diel2 metal1_diel3 metal1_diel4 metal1_diel5 metal1_diel6 metal2 via2 metal2_diel metal2_diel2 metal2_diel3 metal2_diel4 metal3 via3 metal3_diel metal3_diel2 metal3_diel3 metal3_diel4 metal4 via4 metal4_diel metal4_diel2 metal4_diel3 metal4_diel4 metal5 via5 metal5_diel metal5_diel2 metal5_diel3 metal5_diel4 metal6 via6 metal6_diel metal6_diel2 metal6_diel3 metal6_diel4 metal7 via7 metal7_diel metal7_diel2 metal7_diel3 metal8 via8 metal8_diel metal8_diel2 metal8_diel3 metal8_diel4 metal8_diel5 metal9 via9 metal9_diel metal9_diel2 metal9_diel3 metal9_diel4 metal9_diel5 metal9_diel6 metal9_diel7 metal10 metal10_diel metal10_diel2 metal10_diel3) // // Z-COORD NAME TYPE THICKNESS DIEL WIDTH SPACE WIDTH SPACE BIAS ENC NONPLANAR DIELECTRIC PARMS // ACTUAL ACTUAL DRAWN DRAWN TYPE HEIGHT SWTHK SWSLOPE GAP MIN TYPE // TYPE GAP PARMS // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel3 D 0.6000 8.1000 // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel2 D 0.4000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel D 0.0000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10 C 1.4500 3.1775 1.8225 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel7 D 0.2500 4.2000 // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel6 D 0.0750 8.1000 // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel5 D 0.4000 4.2000 // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel4 D 0.0750 8.1000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel3 D 3.2300 4.2000 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel2 D 0.1100 8.1000 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel D -3.3400 4.2000 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // | via9 V 0.8000 3.0000 3.0000 0.0000 metal9 metal10 0.0000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9 C 3.4000 0.4500 0.3500 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel5 D 0.6650 4.2000 // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel4 D 0.0750 8.1000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel3 D 0.7750 4.2000 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel2 D 0.0500 8.1000 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel D -0.8250 4.2000 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // | via8 V 0.7400 0.3600 0.3400 0.0000 metal8 metal9 0.0000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8 C 0.9000 0.4500 0.3500 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel3 D 0.5450 4.2000 // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel2 D 0.0500 5.0000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel D 0.0000 2.9000 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | via7 V 0.5950 0.3600 0.3400 0.0000 metal7 metal8 0.0000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7 C 0.2200 0.1025 0.0975 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel4 D 0.0950 2.9000 // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel3 D 0.0300 4.2000 // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel2 D 0.0500 5.0000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel D 0.0000 2.9000 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // | via6 V 0.1750 0.1000 0.1000 0.0000 metal6 metal7 0.0000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6 C 0.2200 0.1025 0.0975 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel4 D 0.0950 2.9000 // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel3 D 0.0300 4.2000 // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel2 D 0.0500 5.0000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel D 0.0000 2.9000 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // | via5 V 0.1750 0.1000 0.1000 0.0000 metal5 metal6 0.0000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5 C 0.2200 0.1025 0.0975 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel4 D 0.0950 2.9000 // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel3 D 0.0300 4.2000 // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel2 D 0.0500 5.0000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel D 0.0000 2.9000 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // | via4 V 0.1750 0.1000 0.1000 0.0000 metal4 metal5 0.0000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4 C 0.2200 0.1025 0.0975 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel4 D 0.0950 2.9000 // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel3 D 0.0300 4.2000 // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel2 D 0.0500 5.0000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel D 0.0000 2.9000 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | via3 V 0.1750 0.1000 0.1000 0.0000 metal3 metal4 0.0000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3 C 0.2200 0.1025 0.0975 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel4 D 0.0950 2.9000 // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel3 D 0.0300 4.2000 // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel2 D 0.0500 5.0000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel D 0.0000 2.9000 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // | via2 V 0.1750 0.1000 0.1000 0.0000 metal2 metal3 0.0000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2 C 0.2200 0.1025 0.0975 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel6 D 0.0950 2.9000 // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel5 D 0.0300 4.2000 // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel4 D 0.0500 5.0000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel3 D 0.1300 2.9000 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel2 D 0.0300 4.5000 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel D -0.1600 4.2000 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // | via1 V 0.1750 0.1000 0.1000 0.0000 metal1 metal2 0.0000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1 C 0.1800 0.0975 0.0825 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel4 D 0.1700 4.2000 // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel3 D 0.0800 4.2000 // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3400 poly_diel2 D 0.0200 7.5000 C 0.1200 0.0200 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3200 poly_diel D 0.0000 6.2500 C 0.1000 0.0370 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // | polyCont V 0.1700 0.0900 0.1100 0.0000 poly metal1 0.0000 // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly C 0.1000 0.0590 0.1210 0.0600 0.1200 -0.0010 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // | field_base_diel D 0.3200 3.9000 // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // | field_base B 1.0000 // --- -1.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // // =========================== // Non-planar Z coordinate map // =========================== // // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel3 (8.1000) // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel2 (4.2000) // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel (4.2000) metal10 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel7 (4.2000) via9 // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel6 (8.1000) via9 // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel5 (4.2000) via9 // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel4 (8.1000) via9 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel3 (4.2000) metal9 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel2 (8.1000) metal9 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel (4.2000) metal9 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel5 (4.2000) via8 // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel4 (8.1000) via8 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel3 (4.2000) metal8 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel2 (8.1000) metal8 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel (4.2000) metal8 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel3 (4.2000) via7 // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel2 (5.0000) via7 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel (2.9000) metal7 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel4 (2.9000) via6 // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel3 (4.2000) via6 // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel2 (5.0000) via6 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel (2.9000) metal6 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel4 (2.9000) via5 // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel3 (4.2000) via5 // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel2 (5.0000) via5 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel (2.9000) metal5 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel4 (2.9000) via4 // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel3 (4.2000) via4 // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel2 (5.0000) via4 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel (2.9000) metal4 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel4 (2.9000) via3 // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel3 (4.2000) via3 // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel2 (5.0000) via3 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel (2.9000) metal3 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel4 (2.9000) via2 // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel3 (4.2000) via2 // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel2 (5.0000) via2 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel (2.9000) metal2 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel6 (2.9000) via1 // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel5 (4.2000) via1 // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel4 (5.0000) via1 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel3 (2.9000) metal1 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel2 (4.5000) metal1 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel (4.2000) metal1 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) polyCont // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) polyCont poly_diel2 (7.5000) // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel3 (4.2000) poly_diel (6.2500) poly_diel2 (7.5000) poly // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel (6.2500) poly_diel2 (7.5000) poly // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // field_base_diel (3.9000) // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // field_base // // Profile = active // Auxiliary layers = tndiff tpdiff // // Layers = (active_base active_base_diel metal1 metal1_diel metal1_diel2 metal1_diel3 metal1_diel4 metal1_diel5 metal1_diel6 metal2 metal2_diel metal2_diel2 metal2_diel3 metal2_diel4 metal3 metal3_diel metal3_diel2 metal3_diel3 metal3_diel4 metal4 metal4_diel metal4_diel2 metal4_diel3 metal4_diel4 metal5 metal5_diel metal5_diel2 metal5_diel3 metal5_diel4 metal6 metal6_diel metal6_diel2 metal6_diel3 metal6_diel4 metal7 metal7_diel metal7_diel2 metal7_diel3 metal8 metal8_diel metal8_diel2 metal8_diel3 metal8_diel4 metal8_diel5 metal9 metal9_diel metal9_diel2 metal9_diel3 metal9_diel4 metal9_diel5 metal9_diel6 metal9_diel7 metal10 metal10_diel metal10_diel2 metal10_diel3) // // Z-COORD NAME TYPE THICKNESS DIEL WIDTH SPACE ENC NONPLANAR DIELECTRIC PARMS // TYPE HEIGHT SWTHK SWSLOPE GAP MIN TYPE // TYPE GAP PARMS // --- 11.7250 ------------------------------------------------------------------------------------------------------------------ // | metal10_diel3 D 0.6000 8.1000 // --- 11.1250 ------------------------------------------------------------------------------------------------------------------ // | metal10_diel2 D 0.4000 4.2000 // --- 10.7250 ------------------------------------------------------------------------------------------------------------------ // | metal10_diel D 0.0000 4.2000 // --- 10.7250 ------------------------------------------------------------------------------------------------------------------ // | metal10 C 1.4500 3.1775 1.8225 // --- 9.2750 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel7 D 0.2500 4.2000 // --- 9.0250 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel6 D 0.0750 8.1000 // --- 8.9500 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel5 D 0.4000 4.2000 // --- 8.5500 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel4 D 0.0750 8.1000 // --- 8.4750 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel3 D 3.2300 4.2000 // --- 5.2450 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel2 D 0.1100 8.1000 // --- 5.1350 ------------------------------------------------------------------------------------------------------------------ // | metal9_diel D -3.3400 4.2000 // --- 8.4750 ------------------------------------------------------------------------------------------------------------------ // | metal9 C 3.4000 0.4500 0.3500 // --- 5.0750 ------------------------------------------------------------------------------------------------------------------ // | metal8_diel5 D 0.6650 4.2000 // --- 4.4100 ------------------------------------------------------------------------------------------------------------------ // | metal8_diel4 D 0.0750 8.1000 // --- 4.3350 ------------------------------------------------------------------------------------------------------------------ // | metal8_diel3 D 0.7750 4.2000 // --- 3.5600 ------------------------------------------------------------------------------------------------------------------ // | metal8_diel2 D 0.0500 8.1000 // --- 3.5100 ------------------------------------------------------------------------------------------------------------------ // | metal8_diel D -0.8250 4.2000 // --- 4.3350 ------------------------------------------------------------------------------------------------------------------ // | metal8 C 0.9000 0.4500 0.3500 // --- 3.4350 ------------------------------------------------------------------------------------------------------------------ // | metal7_diel3 D 0.5450 4.2000 // --- 2.8900 ------------------------------------------------------------------------------------------------------------------ // | metal7_diel2 D 0.0500 5.0000 // --- 2.8400 ------------------------------------------------------------------------------------------------------------------ // | metal7_diel D 0.0000 2.9000 // --- 2.8400 ------------------------------------------------------------------------------------------------------------------ // | metal7 C 0.2200 0.1025 0.0975 // --- 2.6200 ------------------------------------------------------------------------------------------------------------------ // | metal6_diel4 D 0.0950 2.9000 // --- 2.5250 ------------------------------------------------------------------------------------------------------------------ // | metal6_diel3 D 0.0300 4.2000 // --- 2.4950 ------------------------------------------------------------------------------------------------------------------ // | metal6_diel2 D 0.0500 5.0000 // --- 2.4450 ------------------------------------------------------------------------------------------------------------------ // | metal6_diel D 0.0000 2.9000 // --- 2.4450 ------------------------------------------------------------------------------------------------------------------ // | metal6 C 0.2200 0.1025 0.0975 // --- 2.2250 ------------------------------------------------------------------------------------------------------------------ // | metal5_diel4 D 0.0950 2.9000 // --- 2.1300 ------------------------------------------------------------------------------------------------------------------ // | metal5_diel3 D 0.0300 4.2000 // --- 2.1000 ------------------------------------------------------------------------------------------------------------------ // | metal5_diel2 D 0.0500 5.0000 // --- 2.0500 ------------------------------------------------------------------------------------------------------------------ // | metal5_diel D 0.0000 2.9000 // --- 2.0500 ------------------------------------------------------------------------------------------------------------------ // | metal5 C 0.2200 0.1025 0.0975 // --- 1.8300 ------------------------------------------------------------------------------------------------------------------ // | metal4_diel4 D 0.0950 2.9000 // --- 1.7350 ------------------------------------------------------------------------------------------------------------------ // | metal4_diel3 D 0.0300 4.2000 // --- 1.7050 ------------------------------------------------------------------------------------------------------------------ // | metal4_diel2 D 0.0500 5.0000 // --- 1.6550 ------------------------------------------------------------------------------------------------------------------ // | metal4_diel D 0.0000 2.9000 // --- 1.6550 ------------------------------------------------------------------------------------------------------------------ // | metal4 C 0.2200 0.1025 0.0975 // --- 1.4350 ------------------------------------------------------------------------------------------------------------------ // | metal3_diel4 D 0.0950 2.9000 // --- 1.3400 ------------------------------------------------------------------------------------------------------------------ // | metal3_diel3 D 0.0300 4.2000 // --- 1.3100 ------------------------------------------------------------------------------------------------------------------ // | metal3_diel2 D 0.0500 5.0000 // --- 1.2600 ------------------------------------------------------------------------------------------------------------------ // | metal3_diel D 0.0000 2.9000 // --- 1.2600 ------------------------------------------------------------------------------------------------------------------ // | metal3 C 0.2200 0.1025 0.0975 // --- 1.0400 ------------------------------------------------------------------------------------------------------------------ // | metal2_diel4 D 0.0950 2.9000 // --- 0.9450 ------------------------------------------------------------------------------------------------------------------ // | metal2_diel3 D 0.0300 4.2000 // --- 0.9150 ------------------------------------------------------------------------------------------------------------------ // | metal2_diel2 D 0.0500 5.0000 // --- 0.8650 ------------------------------------------------------------------------------------------------------------------ // | metal2_diel D 0.0000 2.9000 // --- 0.8650 ------------------------------------------------------------------------------------------------------------------ // | metal2 C 0.2200 0.1025 0.0975 // --- 0.6450 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel6 D 0.0950 2.9000 // --- 0.5500 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel5 D 0.0300 4.2000 // --- 0.5200 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel4 D 0.0500 5.0000 // --- 0.4700 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel3 D 0.1300 2.9000 // --- 0.3400 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel2 D 0.0300 4.5000 // --- 0.3100 ------------------------------------------------------------------------------------------------------------------ // | metal1_diel D -0.1600 4.2000 // --- 0.4700 ------------------------------------------------------------------------------------------------------------------ // | metal1 C 0.1800 0.0975 0.0825 // --- 0.2900 ------------------------------------------------------------------------------------------------------------------ // | active_base_diel D 0.2900 4.2000 // --- 0.0000 ------------------------------------------------------------------------------------------------------------------ // | active_base B 1.0000 // --- -1.0000 ------------------------------------------------------------------------------------------------------------------ // // =========================== // Non-planar Z coordinate map // =========================== // // --- 11.7250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel3 (8.1000) // --- 11.1250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel2 (4.2000) // --- 10.7250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel (4.2000) metal10 // --- 9.2750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel7 (4.2000) // --- 9.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel6 (8.1000) // --- 8.9500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel5 (4.2000) // --- 8.5500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel4 (8.1000) // --- 8.4750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel3 (4.2000) metal9 // --- 5.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel2 (8.1000) metal9 // --- 5.1350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel (4.2000) metal9 // --- 5.0750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel5 (4.2000) // --- 4.4100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel4 (8.1000) // --- 4.3350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel3 (4.2000) metal8 // --- 3.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel2 (8.1000) metal8 // --- 3.5100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel (4.2000) metal8 // --- 3.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel3 (4.2000) // --- 2.8900 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel2 (5.0000) // --- 2.8400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel (2.9000) metal7 // --- 2.6200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel4 (2.9000) // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel3 (4.2000) // --- 2.4950 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel2 (5.0000) // --- 2.4450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel (2.9000) metal6 // --- 2.2250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel4 (2.9000) // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel3 (4.2000) // --- 2.1000 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel2 (5.0000) // --- 2.0500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel (2.9000) metal5 // --- 1.8300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel4 (2.9000) // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel3 (4.2000) // --- 1.7050 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel2 (5.0000) // --- 1.6550 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel (2.9000) metal4 // --- 1.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel4 (2.9000) // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel3 (4.2000) // --- 1.3100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel2 (5.0000) // --- 1.2600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel (2.9000) metal3 // --- 1.0400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel4 (2.9000) // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel3 (4.2000) // --- 0.9150 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel2 (5.0000) // --- 0.8650 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel (2.9000) metal2 // --- 0.6450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel6 (2.9000) // --- 0.5500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel5 (4.2000) // --- 0.5200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel4 (5.0000) // --- 0.4700 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel3 (2.9000) metal1 // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel2 (4.5000) metal1 // --- 0.3100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel (4.2000) metal1 // --- 0.2900 --------------------------------------------------------------------------------------------------------------------------------------------- // active_base_diel (4.2000) // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // active_base // // Profile = sdcont // Required layers = diff // Auxiliary layers = tndiff tpdiff // // Layers = (sdcont_base sdcont_base_diel diff odCont diff_diel poly poly_diel poly_diel2 poly_diel3 poly_diel4 metal1 metal1_diel metal1_diel2 metal1_diel3 metal1_diel4 metal1_diel5 metal1_diel6 metal2 metal2_diel metal2_diel2 metal2_diel3 metal2_diel4 metal3 metal3_diel metal3_diel2 metal3_diel3 metal3_diel4 metal4 metal4_diel metal4_diel2 metal4_diel3 metal4_diel4 metal5 metal5_diel metal5_diel2 metal5_diel3 metal5_diel4 metal6 metal6_diel metal6_diel2 metal6_diel3 metal6_diel4 metal7 metal7_diel metal7_diel2 metal7_diel3 metal8 metal8_diel metal8_diel2 metal8_diel3 metal8_diel4 metal8_diel5 metal9 metal9_diel metal9_diel2 metal9_diel3 metal9_diel4 metal9_diel5 metal9_diel6 metal9_diel7 metal10 metal10_diel metal10_diel2 metal10_diel3) // // Z-COORD NAME TYPE THICKNESS DIEL WIDTH SPACE WIDTH SPACE BIAS ENC NONPLANAR DIELECTRIC PARMS // ACTUAL ACTUAL DRAWN DRAWN TYPE HEIGHT SWTHK SWSLOPE GAP MIN TYPE // TYPE GAP PARMS // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel3 D 0.6000 8.1000 // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel2 D 0.4000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel D 0.0000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10 C 1.4500 3.1775 1.8225 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel7 D 0.2500 4.2000 // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel6 D 0.0750 8.1000 // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel5 D 0.4000 4.2000 // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel4 D 0.0750 8.1000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel3 D 3.2300 4.2000 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel2 D 0.1100 8.1000 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel D -3.3400 4.2000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9 C 3.4000 0.4500 0.3500 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel5 D 0.6650 4.2000 // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel4 D 0.0750 8.1000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel3 D 0.7750 4.2000 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel2 D 0.0500 8.1000 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel D -0.8250 4.2000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8 C 0.9000 0.4500 0.3500 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel3 D 0.5450 4.2000 // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel2 D 0.0500 5.0000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel D 0.0000 2.9000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7 C 0.2200 0.1025 0.0975 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel4 D 0.0950 2.9000 // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel3 D 0.0300 4.2000 // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel2 D 0.0500 5.0000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel D 0.0000 2.9000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6 C 0.2200 0.1025 0.0975 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel4 D 0.0950 2.9000 // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel3 D 0.0300 4.2000 // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel2 D 0.0500 5.0000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel D 0.0000 2.9000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5 C 0.2200 0.1025 0.0975 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel4 D 0.0950 2.9000 // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel3 D 0.0300 4.2000 // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel2 D 0.0500 5.0000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel D 0.0000 2.9000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4 C 0.2200 0.1025 0.0975 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel4 D 0.0950 2.9000 // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel3 D 0.0300 4.2000 // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel2 D 0.0500 5.0000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel D 0.0000 2.9000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3 C 0.2200 0.1025 0.0975 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel4 D 0.0950 2.9000 // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel3 D 0.0300 4.2000 // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel2 D 0.0500 5.0000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel D 0.0000 2.9000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2 C 0.2200 0.1025 0.0975 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel6 D 0.0950 2.9000 // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel5 D 0.0300 4.2000 // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel4 D 0.0500 5.0000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel3 D 0.1300 2.9000 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel2 D 0.0300 4.5000 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel D -0.1600 4.2000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1 C 0.1800 0.0975 0.0825 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel4 D 0.1700 4.2000 // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel3 D 0.0800 4.2000 // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3400 poly_diel2 D 0.0200 7.5000 C 0.1200 0.0200 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3200 poly_diel D 0.0000 6.2500 C 0.1000 0.0370 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly C 0.1000 0.0590 0.1210 0.0600 0.1200 -0.0010 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // | diff_diel D 0.0200 3.9000 // --- 0.2140 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // | odCont V 0.2900 0.0900 0.1100 0.0000 diff metal1 0.0550 // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // | diff C 0.0860 0.0800 0.0600 // --- 0.2140 --------------------------------------------------------------------------------------------------------------------------------------------- // | sdcont_base_diel D 0.2140 3.9000 // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // | sdcont_base B 1.0000 // --- -1.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // // =========================== // Non-planar Z coordinate map // =========================== // // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel3 (8.1000) // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel2 (4.2000) // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel (4.2000) metal10 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel7 (4.2000) // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel6 (8.1000) // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel5 (4.2000) // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel4 (8.1000) // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel3 (4.2000) metal9 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel2 (8.1000) metal9 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel (4.2000) metal9 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel5 (4.2000) // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel4 (8.1000) // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel3 (4.2000) metal8 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel2 (8.1000) metal8 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel (4.2000) metal8 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel3 (4.2000) // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel2 (5.0000) // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel (2.9000) metal7 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel4 (2.9000) // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel3 (4.2000) // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel2 (5.0000) // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel (2.9000) metal6 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel4 (2.9000) // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel3 (4.2000) // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel2 (5.0000) // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel (2.9000) metal5 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel4 (2.9000) // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel3 (4.2000) // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel2 (5.0000) // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel (2.9000) metal4 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel4 (2.9000) // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel3 (4.2000) // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel2 (5.0000) // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel (2.9000) metal3 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel4 (2.9000) // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel3 (4.2000) // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel2 (5.0000) // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel (2.9000) metal2 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel6 (2.9000) // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel5 (4.2000) // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel4 (5.0000) // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel3 (2.9000) metal1 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel2 (4.5000) metal1 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel (4.2000) metal1 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) odCont // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) odCont poly_diel2 (7.5000) // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel3 (4.2000) odCont poly_diel2 (7.5000) poly_diel (6.2500) poly // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // odCont poly_diel2 (7.5000) poly_diel (6.2500) poly // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // diff_diel (3.9000) odCont // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // diff_diel (3.9000) diff // --- 0.2140 --------------------------------------------------------------------------------------------------------------------------------------------- // sdcont_base_diel (3.9000) // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // sdcont_base // // Profile = diffcap // Required layers = diff2 // Auxiliary layers = tndiff tpdiff // // Layers = (diffcap_base_diel diff2 diff2_diel diff2_diel2 poly poly_diel poly_diel2 poly_diel3 poly_diel4 metal1 metal1_diel metal1_diel2 metal1_diel3 metal1_diel4 metal1_diel5 metal1_diel6 metal2 metal2_diel metal2_diel2 metal2_diel3 metal2_diel4 metal3 metal3_diel metal3_diel2 metal3_diel3 metal3_diel4 metal4 metal4_diel metal4_diel2 metal4_diel3 metal4_diel4 metal5 metal5_diel metal5_diel2 metal5_diel3 metal5_diel4 metal6 metal6_diel metal6_diel2 metal6_diel3 metal6_diel4 metal7 metal7_diel metal7_diel2 metal7_diel3 metal8 metal8_diel metal8_diel2 metal8_diel3 metal8_diel4 metal8_diel5 metal9 metal9_diel metal9_diel2 metal9_diel3 metal9_diel4 metal9_diel5 metal9_diel6 metal9_diel7 metal10 metal10_diel metal10_diel2 metal10_diel3) // // Z-COORD NAME TYPE THICKNESS DIEL WIDTH SPACE WIDTH SPACE BIAS ENC NONPLANAR DIELECTRIC PARMS // ACTUAL ACTUAL DRAWN DRAWN TYPE HEIGHT SWTHK SWSLOPE GAP MIN TYPE // TYPE GAP PARMS // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel3 D 0.6000 8.1000 // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel2 D 0.4000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10_diel D 0.0000 4.2000 // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal10 C 1.4500 3.1775 1.8225 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel7 D 0.2500 4.2000 // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel6 D 0.0750 8.1000 // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel5 D 0.4000 4.2000 // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel4 D 0.0750 8.1000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel3 D 3.2300 4.2000 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel2 D 0.1100 8.1000 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9_diel D -3.3400 4.2000 // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal9 C 3.4000 0.4500 0.3500 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel5 D 0.6650 4.2000 // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel4 D 0.0750 8.1000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel3 D 0.7750 4.2000 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel2 D 0.0500 8.1000 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8_diel D -0.8250 4.2000 // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal8 C 0.9000 0.4500 0.3500 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel3 D 0.5450 4.2000 // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel2 D 0.0500 5.0000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7_diel D 0.0000 2.9000 // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal7 C 0.2200 0.1025 0.0975 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel4 D 0.0950 2.9000 // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel3 D 0.0300 4.2000 // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel2 D 0.0500 5.0000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6_diel D 0.0000 2.9000 // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal6 C 0.2200 0.1025 0.0975 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel4 D 0.0950 2.9000 // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel3 D 0.0300 4.2000 // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel2 D 0.0500 5.0000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5_diel D 0.0000 2.9000 // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal5 C 0.2200 0.1025 0.0975 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel4 D 0.0950 2.9000 // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel3 D 0.0300 4.2000 // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel2 D 0.0500 5.0000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4_diel D 0.0000 2.9000 // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal4 C 0.2200 0.1025 0.0975 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel4 D 0.0950 2.9000 // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel3 D 0.0300 4.2000 // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel2 D 0.0500 5.0000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3_diel D 0.0000 2.9000 // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal3 C 0.2200 0.1025 0.0975 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel4 D 0.0950 2.9000 // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel3 D 0.0300 4.2000 // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel2 D 0.0500 5.0000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2_diel D 0.0000 2.9000 // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal2 C 0.2200 0.1025 0.0975 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel6 D 0.0950 2.9000 // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel5 D 0.0300 4.2000 // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel4 D 0.0500 5.0000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel3 D 0.1300 2.9000 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel2 D 0.0300 4.5000 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1_diel D -0.1600 4.2000 // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // | metal1 C 0.1800 0.0975 0.0825 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel4 D 0.1700 4.2000 // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly_diel3 D 0.0800 4.2000 // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3400 poly_diel2 D 0.0200 7.5000 C 0.1200 0.0200 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.3200 poly_diel D 0.0000 6.2500 C 0.1000 0.0370 90.0000 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // | poly C 0.1000 0.0590 0.1210 0.0600 0.1200 -0.0010 // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // | diff2_diel2 D 0.0200 3.9000 // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // | 0.0000 diff2_diel D 0.0000 12.0000 C -0.3000 0.0000 90.0000 // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // | diff2 C 0.0860 0.0800 0.0600 // --- 0.2140 --------------------------------------------------------------------------------------------------------------------------------------------- // // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // | diffcap_base_diel D 0.3000 3.9000 // --- 0.0000 --------------------------------------------------------------------------------------------------------------------------------------------- // // =========================== // Non-planar Z coordinate map // =========================== // // --- 12.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel3 (8.1000) // --- 11.4250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel2 (4.2000) // --- 11.0250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal10_diel (4.2000) metal10 // --- 9.5750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel7 (4.2000) // --- 9.3250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel6 (8.1000) // --- 9.2500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel5 (4.2000) // --- 8.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel4 (8.1000) // --- 8.7750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel3 (4.2000) metal9 // --- 5.5450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel2 (8.1000) metal9 // --- 5.4350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal9_diel (4.2000) metal9 // --- 5.3750 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel5 (4.2000) // --- 4.7100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel4 (8.1000) // --- 4.6350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel3 (4.2000) metal8 // --- 3.8600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel2 (8.1000) metal8 // --- 3.8100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal8_diel (4.2000) metal8 // --- 3.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel3 (4.2000) // --- 3.1900 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel2 (5.0000) // --- 3.1400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal7_diel (2.9000) metal7 // --- 2.9200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel4 (2.9000) // --- 2.8250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel3 (4.2000) // --- 2.7950 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel2 (5.0000) // --- 2.7450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal6_diel (2.9000) metal6 // --- 2.5250 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel4 (2.9000) // --- 2.4300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel3 (4.2000) // --- 2.4000 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel2 (5.0000) // --- 2.3500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal5_diel (2.9000) metal5 // --- 2.1300 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel4 (2.9000) // --- 2.0350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel3 (4.2000) // --- 2.0050 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel2 (5.0000) // --- 1.9550 --------------------------------------------------------------------------------------------------------------------------------------------- // metal4_diel (2.9000) metal4 // --- 1.7350 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel4 (2.9000) // --- 1.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel3 (4.2000) // --- 1.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel2 (5.0000) // --- 1.5600 --------------------------------------------------------------------------------------------------------------------------------------------- // metal3_diel (2.9000) metal3 // --- 1.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel4 (2.9000) // --- 1.2450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel3 (4.2000) // --- 1.2150 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel2 (5.0000) // --- 1.1650 --------------------------------------------------------------------------------------------------------------------------------------------- // metal2_diel (2.9000) metal2 // --- 0.9450 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel6 (2.9000) // --- 0.8500 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel5 (4.2000) // --- 0.8200 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel4 (5.0000) // --- 0.7700 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel3 (2.9000) metal1 // --- 0.6400 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel2 (4.5000) metal1 // --- 0.6100 --------------------------------------------------------------------------------------------------------------------------------------------- // metal1_diel (4.2000) metal1 // --- 0.5900 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) // --- 0.4400 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel4 (4.2000) poly_diel2 (7.5000) // --- 0.4200 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel3 (4.2000) poly_diel2 (7.5000) poly_diel (6.2500) poly // --- 0.3400 --------------------------------------------------------------------------------------------------------------------------------------------- // poly_diel2 (7.5000) poly_diel (6.2500) poly // --- 0.3200 --------------------------------------------------------------------------------------------------------------------------------------------- // diff2_diel2 (3.9000) // --- 0.3000 --------------------------------------------------------------------------------------------------------------------------------------------- // diff2_diel (12.0000) diff2 diffcap_base_diel (3.9000) // --- 0.2140 --------------------------------------------------------------------------------------------------------------------------------------------- // diff2_diel (12.0000) diffcap_base_diel (3.9000) VARIABLE default_profileid 0 PEX PROFILE default default_profileid [ tndiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 tpdiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 poly CONDUCTOR 0.32 0.42 MINWIDTH 0.06 MINSPACING 0.12 metal1 CONDUCTOR 0.59 0.77 MINWIDTH 0.09 MINSPACING 0.09 metal2 CONDUCTOR 0.945 1.165 MINWIDTH 0.1 MINSPACING 0.1 metal3 CONDUCTOR 1.34 1.56 MINWIDTH 0.1 MINSPACING 0.1 metal4 CONDUCTOR 1.735 1.955 MINWIDTH 0.1 MINSPACING 0.1 metal5 CONDUCTOR 2.13 2.35 MINWIDTH 0.1 MINSPACING 0.1 metal6 CONDUCTOR 2.525 2.745 MINWIDTH 0.1 MINSPACING 0.1 metal7 CONDUCTOR 2.92 3.14 MINWIDTH 0.1 MINSPACING 0.1 metal8 CONDUCTOR 3.735 4.635 MINWIDTH 0.4 MINSPACING 0.4 metal9 CONDUCTOR 5.375 8.775 MINWIDTH 2 MINSPACING 2 metal10 CONDUCTOR 9.575 11.025 MINWIDTH 3 MINSPACING 2 diffcap_base_diel PLANAR 0 0.3 3.9 diff2_diel CONFORMAL tndiff 0.214 0.3 0 -0.3 0 12 diff2_diel CONFORMAL tpdiff 0.214 0.3 0 -0.3 0 12 diff2_diel2 PLANAR 0.3 0.32 3.9 poly_diel CONFORMAL poly 0.32 0.42 0 0 0.037 6.25 poly_diel2 CONFORMAL poly_diel 0.32 0.42 0.02 0.02 0.02 7.5 poly_diel3 PLANAR 0.34 0.42 4.2 poly_diel4 PLANAR 0.42 0.59 4.2 metal1_diel PLANAR 0.59 0.61 4.2 metal1_diel2 PLANAR 0.61 0.64 4.5 metal1_diel3 PLANAR 0.64 0.77 2.9 metal1_diel4 PLANAR 0.77 0.82 5 metal1_diel5 PLANAR 0.82 0.85 4.2 metal1_diel6 PLANAR 0.85 0.945 2.9 metal2_diel PLANAR 0.945 1.165 2.9 metal2_diel2 PLANAR 1.165 1.215 5 metal2_diel3 PLANAR 1.215 1.245 4.2 metal2_diel4 PLANAR 1.245 1.34 2.9 metal3_diel PLANAR 1.34 1.56 2.9 metal3_diel2 PLANAR 1.56 1.61 5 metal3_diel3 PLANAR 1.61 1.64 4.2 metal3_diel4 PLANAR 1.64 1.735 2.9 metal4_diel PLANAR 1.735 1.955 2.9 metal4_diel2 PLANAR 1.955 2.005 5 metal4_diel3 PLANAR 2.005 2.035 4.2 metal4_diel4 PLANAR 2.035 2.13 2.9 metal5_diel PLANAR 2.13 2.35 2.9 metal5_diel2 PLANAR 2.35 2.4 5 metal5_diel3 PLANAR 2.4 2.43 4.2 metal5_diel4 PLANAR 2.43 2.525 2.9 metal6_diel PLANAR 2.525 2.745 2.9 metal6_diel2 PLANAR 2.745 2.795 5 metal6_diel3 PLANAR 2.795 2.825 4.2 metal6_diel4 PLANAR 2.825 2.92 2.9 metal7_diel PLANAR 2.92 3.14 2.9 metal7_diel2 PLANAR 3.14 3.19 5 metal7_diel3 PLANAR 3.19 3.735 4.2 metal8_diel PLANAR 3.735 3.81 4.2 metal8_diel2 PLANAR 3.81 3.86 8.1 metal8_diel3 PLANAR 3.86 4.635 4.2 metal8_diel4 PLANAR 4.635 4.71 8.1 metal8_diel5 PLANAR 4.71 5.375 4.2 metal9_diel PLANAR 5.375 5.435 4.2 metal9_diel2 PLANAR 5.435 5.545 8.1 metal9_diel3 PLANAR 5.545 8.775 4.2 metal9_diel4 PLANAR 8.775 8.85 8.1 metal9_diel5 PLANAR 8.85 9.25 4.2 metal9_diel6 PLANAR 9.25 9.325 8.1 metal9_diel7 PLANAR 9.325 9.575 4.2 metal10_diel PLANAR 9.575 11.025 4.2 metal10_diel2 PLANAR 11.025 11.425 4.2 metal10_diel3 PLANAR 11.425 12.025 8.1 ] VARIABLE field_profileid 1 PEX PROFILE field field_profileid [ poly CONDUCTOR 0.32 0.42 MINWIDTH 0.06 MINSPACING 0.12 metal1 CONDUCTOR 0.59 0.77 MINWIDTH 0.09 MINSPACING 0.09 metal2 CONDUCTOR 0.945 1.165 MINWIDTH 0.1 MINSPACING 0.1 metal3 CONDUCTOR 1.34 1.56 MINWIDTH 0.1 MINSPACING 0.1 metal4 CONDUCTOR 1.735 1.955 MINWIDTH 0.1 MINSPACING 0.1 metal5 CONDUCTOR 2.13 2.35 MINWIDTH 0.1 MINSPACING 0.1 metal6 CONDUCTOR 2.525 2.745 MINWIDTH 0.1 MINSPACING 0.1 metal7 CONDUCTOR 2.92 3.14 MINWIDTH 0.1 MINSPACING 0.1 metal8 CONDUCTOR 3.735 4.635 MINWIDTH 0.4 MINSPACING 0.4 metal9 CONDUCTOR 5.375 8.775 MINWIDTH 2 MINSPACING 2 metal10 CONDUCTOR 9.575 11.025 MINWIDTH 3 MINSPACING 2 field_base_diel PLANAR 0 0.32 3.9 poly_diel CONFORMAL poly 0.32 0.42 0 0 0.037 6.25 poly_diel2 CONFORMAL poly_diel 0.32 0.42 0.02 0.02 0.02 7.5 poly_diel3 PLANAR 0.34 0.42 4.2 poly_diel4 PLANAR 0.42 0.59 4.2 metal1_diel PLANAR 0.59 0.61 4.2 metal1_diel2 PLANAR 0.61 0.64 4.5 metal1_diel3 PLANAR 0.64 0.77 2.9 metal1_diel4 PLANAR 0.77 0.82 5 metal1_diel5 PLANAR 0.82 0.85 4.2 metal1_diel6 PLANAR 0.85 0.945 2.9 metal2_diel PLANAR 0.945 1.165 2.9 metal2_diel2 PLANAR 1.165 1.215 5 metal2_diel3 PLANAR 1.215 1.245 4.2 metal2_diel4 PLANAR 1.245 1.34 2.9 metal3_diel PLANAR 1.34 1.56 2.9 metal3_diel2 PLANAR 1.56 1.61 5 metal3_diel3 PLANAR 1.61 1.64 4.2 metal3_diel4 PLANAR 1.64 1.735 2.9 metal4_diel PLANAR 1.735 1.955 2.9 metal4_diel2 PLANAR 1.955 2.005 5 metal4_diel3 PLANAR 2.005 2.035 4.2 metal4_diel4 PLANAR 2.035 2.13 2.9 metal5_diel PLANAR 2.13 2.35 2.9 metal5_diel2 PLANAR 2.35 2.4 5 metal5_diel3 PLANAR 2.4 2.43 4.2 metal5_diel4 PLANAR 2.43 2.525 2.9 metal6_diel PLANAR 2.525 2.745 2.9 metal6_diel2 PLANAR 2.745 2.795 5 metal6_diel3 PLANAR 2.795 2.825 4.2 metal6_diel4 PLANAR 2.825 2.92 2.9 metal7_diel PLANAR 2.92 3.14 2.9 metal7_diel2 PLANAR 3.14 3.19 5 metal7_diel3 PLANAR 3.19 3.735 4.2 metal8_diel PLANAR 3.735 3.81 4.2 metal8_diel2 PLANAR 3.81 3.86 8.1 metal8_diel3 PLANAR 3.86 4.635 4.2 metal8_diel4 PLANAR 4.635 4.71 8.1 metal8_diel5 PLANAR 4.71 5.375 4.2 metal9_diel PLANAR 5.375 5.435 4.2 metal9_diel2 PLANAR 5.435 5.545 8.1 metal9_diel3 PLANAR 5.545 8.775 4.2 metal9_diel4 PLANAR 8.775 8.85 8.1 metal9_diel5 PLANAR 8.85 9.25 4.2 metal9_diel6 PLANAR 9.25 9.325 8.1 metal9_diel7 PLANAR 9.325 9.575 4.2 metal10_diel PLANAR 9.575 11.025 4.2 metal10_diel2 PLANAR 11.025 11.425 4.2 metal10_diel3 PLANAR 11.425 12.025 8.1 ] VARIABLE active_profileid 2 PEX PROFILE active active_profileid [ tndiff CONDUCTOR 0 0 tpdiff CONDUCTOR 0 0 metal1 CONDUCTOR 0.29 0.47 MINWIDTH 0.09 MINSPACING 0.09 metal2 CONDUCTOR 0.645 0.865 MINWIDTH 0.1 MINSPACING 0.1 metal3 CONDUCTOR 1.04 1.26 MINWIDTH 0.1 MINSPACING 0.1 metal4 CONDUCTOR 1.435 1.655 MINWIDTH 0.1 MINSPACING 0.1 metal5 CONDUCTOR 1.83 2.05 MINWIDTH 0.1 MINSPACING 0.1 metal6 CONDUCTOR 2.225 2.445 MINWIDTH 0.1 MINSPACING 0.1 metal7 CONDUCTOR 2.62 2.84 MINWIDTH 0.1 MINSPACING 0.1 metal8 CONDUCTOR 3.435 4.335 MINWIDTH 0.4 MINSPACING 0.4 metal9 CONDUCTOR 5.075 8.475 MINWIDTH 2 MINSPACING 2 metal10 CONDUCTOR 9.275 10.725 MINWIDTH 3 MINSPACING 2 active_base_diel PLANAR 0 0.29 4.2 metal1_diel PLANAR 0.29 0.31 4.2 metal1_diel2 PLANAR 0.31 0.34 4.5 metal1_diel3 PLANAR 0.34 0.47 2.9 metal1_diel4 PLANAR 0.47 0.52 5 metal1_diel5 PLANAR 0.52 0.55 4.2 metal1_diel6 PLANAR 0.55 0.645 2.9 metal2_diel PLANAR 0.645 0.865 2.9 metal2_diel2 PLANAR 0.865 0.915 5 metal2_diel3 PLANAR 0.915 0.945 4.2 metal2_diel4 PLANAR 0.945 1.04 2.9 metal3_diel PLANAR 1.04 1.26 2.9 metal3_diel2 PLANAR 1.26 1.31 5 metal3_diel3 PLANAR 1.31 1.34 4.2 metal3_diel4 PLANAR 1.34 1.435 2.9 metal4_diel PLANAR 1.435 1.655 2.9 metal4_diel2 PLANAR 1.655 1.705 5 metal4_diel3 PLANAR 1.705 1.735 4.2 metal4_diel4 PLANAR 1.735 1.83 2.9 metal5_diel PLANAR 1.83 2.05 2.9 metal5_diel2 PLANAR 2.05 2.1 5 metal5_diel3 PLANAR 2.1 2.13 4.2 metal5_diel4 PLANAR 2.13 2.225 2.9 metal6_diel PLANAR 2.225 2.445 2.9 metal6_diel2 PLANAR 2.445 2.495 5 metal6_diel3 PLANAR 2.495 2.525 4.2 metal6_diel4 PLANAR 2.525 2.62 2.9 metal7_diel PLANAR 2.62 2.84 2.9 metal7_diel2 PLANAR 2.84 2.89 5 metal7_diel3 PLANAR 2.89 3.435 4.2 metal8_diel PLANAR 3.435 3.51 4.2 metal8_diel2 PLANAR 3.51 3.56 8.1 metal8_diel3 PLANAR 3.56 4.335 4.2 metal8_diel4 PLANAR 4.335 4.41 8.1 metal8_diel5 PLANAR 4.41 5.075 4.2 metal9_diel PLANAR 5.075 5.135 4.2 metal9_diel2 PLANAR 5.135 5.245 8.1 metal9_diel3 PLANAR 5.245 8.475 4.2 metal9_diel4 PLANAR 8.475 8.55 8.1 metal9_diel5 PLANAR 8.55 8.95 4.2 metal9_diel6 PLANAR 8.95 9.025 8.1 metal9_diel7 PLANAR 9.025 9.275 4.2 metal10_diel PLANAR 9.275 10.725 4.2 metal10_diel2 PLANAR 10.725 11.125 4.2 metal10_diel3 PLANAR 11.125 11.725 8.1 ] VARIABLE sdcont_profileid 3 PEX PROFILE sdcont sdcont_profileid [ tndiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 tpdiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 poly CONDUCTOR 0.32 0.42 MINWIDTH 0.06 MINSPACING 0.12 metal1 CONDUCTOR 0.59 0.77 MINWIDTH 0.09 MINSPACING 0.09 metal2 CONDUCTOR 0.945 1.165 MINWIDTH 0.1 MINSPACING 0.1 metal3 CONDUCTOR 1.34 1.56 MINWIDTH 0.1 MINSPACING 0.1 metal4 CONDUCTOR 1.735 1.955 MINWIDTH 0.1 MINSPACING 0.1 metal5 CONDUCTOR 2.13 2.35 MINWIDTH 0.1 MINSPACING 0.1 metal6 CONDUCTOR 2.525 2.745 MINWIDTH 0.1 MINSPACING 0.1 metal7 CONDUCTOR 2.92 3.14 MINWIDTH 0.1 MINSPACING 0.1 metal8 CONDUCTOR 3.735 4.635 MINWIDTH 0.4 MINSPACING 0.4 metal9 CONDUCTOR 5.375 8.775 MINWIDTH 2 MINSPACING 2 metal10 CONDUCTOR 9.575 11.025 MINWIDTH 3 MINSPACING 2 sdcont_base_diel PLANAR 0 0.214 3.9 diff_diel PLANAR 0.214 0.32 3.9 poly_diel CONFORMAL poly 0.32 0.42 0 0 0.037 6.25 poly_diel2 CONFORMAL poly_diel 0.32 0.42 0.02 0.02 0.02 7.5 poly_diel3 PLANAR 0.34 0.42 4.2 poly_diel4 PLANAR 0.42 0.59 4.2 metal1_diel PLANAR 0.59 0.61 4.2 metal1_diel2 PLANAR 0.61 0.64 4.5 metal1_diel3 PLANAR 0.64 0.77 2.9 metal1_diel4 PLANAR 0.77 0.82 5 metal1_diel5 PLANAR 0.82 0.85 4.2 metal1_diel6 PLANAR 0.85 0.945 2.9 metal2_diel PLANAR 0.945 1.165 2.9 metal2_diel2 PLANAR 1.165 1.215 5 metal2_diel3 PLANAR 1.215 1.245 4.2 metal2_diel4 PLANAR 1.245 1.34 2.9 metal3_diel PLANAR 1.34 1.56 2.9 metal3_diel2 PLANAR 1.56 1.61 5 metal3_diel3 PLANAR 1.61 1.64 4.2 metal3_diel4 PLANAR 1.64 1.735 2.9 metal4_diel PLANAR 1.735 1.955 2.9 metal4_diel2 PLANAR 1.955 2.005 5 metal4_diel3 PLANAR 2.005 2.035 4.2 metal4_diel4 PLANAR 2.035 2.13 2.9 metal5_diel PLANAR 2.13 2.35 2.9 metal5_diel2 PLANAR 2.35 2.4 5 metal5_diel3 PLANAR 2.4 2.43 4.2 metal5_diel4 PLANAR 2.43 2.525 2.9 metal6_diel PLANAR 2.525 2.745 2.9 metal6_diel2 PLANAR 2.745 2.795 5 metal6_diel3 PLANAR 2.795 2.825 4.2 metal6_diel4 PLANAR 2.825 2.92 2.9 metal7_diel PLANAR 2.92 3.14 2.9 metal7_diel2 PLANAR 3.14 3.19 5 metal7_diel3 PLANAR 3.19 3.735 4.2 metal8_diel PLANAR 3.735 3.81 4.2 metal8_diel2 PLANAR 3.81 3.86 8.1 metal8_diel3 PLANAR 3.86 4.635 4.2 metal8_diel4 PLANAR 4.635 4.71 8.1 metal8_diel5 PLANAR 4.71 5.375 4.2 metal9_diel PLANAR 5.375 5.435 4.2 metal9_diel2 PLANAR 5.435 5.545 8.1 metal9_diel3 PLANAR 5.545 8.775 4.2 metal9_diel4 PLANAR 8.775 8.85 8.1 metal9_diel5 PLANAR 8.85 9.25 4.2 metal9_diel6 PLANAR 9.25 9.325 8.1 metal9_diel7 PLANAR 9.325 9.575 4.2 metal10_diel PLANAR 9.575 11.025 4.2 metal10_diel2 PLANAR 11.025 11.425 4.2 metal10_diel3 PLANAR 11.425 12.025 8.1 ] VARIABLE diffcap_profileid 4 PEX PROFILE diffcap diffcap_profileid [ tndiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 tpdiff CONDUCTOR 0.214 0.3 MINWIDTH 0.08 MINSPACING 0.06 poly CONDUCTOR 0.32 0.42 MINWIDTH 0.06 MINSPACING 0.12 metal1 CONDUCTOR 0.59 0.77 MINWIDTH 0.09 MINSPACING 0.09 metal2 CONDUCTOR 0.945 1.165 MINWIDTH 0.1 MINSPACING 0.1 metal3 CONDUCTOR 1.34 1.56 MINWIDTH 0.1 MINSPACING 0.1 metal4 CONDUCTOR 1.735 1.955 MINWIDTH 0.1 MINSPACING 0.1 metal5 CONDUCTOR 2.13 2.35 MINWIDTH 0.1 MINSPACING 0.1 metal6 CONDUCTOR 2.525 2.745 MINWIDTH 0.1 MINSPACING 0.1 metal7 CONDUCTOR 2.92 3.14 MINWIDTH 0.1 MINSPACING 0.1 metal8 CONDUCTOR 3.735 4.635 MINWIDTH 0.4 MINSPACING 0.4 metal9 CONDUCTOR 5.375 8.775 MINWIDTH 2 MINSPACING 2 metal10 CONDUCTOR 9.575 11.025 MINWIDTH 3 MINSPACING 2 diffcap_base_diel PLANAR 0 0.3 3.9 diff2_diel CONFORMAL tndiff 0.214 0.3 0 -0.3 0 12 diff2_diel CONFORMAL tpdiff 0.214 0.3 0 -0.3 0 12 diff2_diel2 PLANAR 0.3 0.32 3.9 poly_diel CONFORMAL poly 0.32 0.42 0 0 0.037 6.25 poly_diel2 CONFORMAL poly_diel 0.32 0.42 0.02 0.02 0.02 7.5 poly_diel3 PLANAR 0.34 0.42 4.2 poly_diel4 PLANAR 0.42 0.59 4.2 metal1_diel PLANAR 0.59 0.61 4.2 metal1_diel2 PLANAR 0.61 0.64 4.5 metal1_diel3 PLANAR 0.64 0.77 2.9 metal1_diel4 PLANAR 0.77 0.82 5 metal1_diel5 PLANAR 0.82 0.85 4.2 metal1_diel6 PLANAR 0.85 0.945 2.9 metal2_diel PLANAR 0.945 1.165 2.9 metal2_diel2 PLANAR 1.165 1.215 5 metal2_diel3 PLANAR 1.215 1.245 4.2 metal2_diel4 PLANAR 1.245 1.34 2.9 metal3_diel PLANAR 1.34 1.56 2.9 metal3_diel2 PLANAR 1.56 1.61 5 metal3_diel3 PLANAR 1.61 1.64 4.2 metal3_diel4 PLANAR 1.64 1.735 2.9 metal4_diel PLANAR 1.735 1.955 2.9 metal4_diel2 PLANAR 1.955 2.005 5 metal4_diel3 PLANAR 2.005 2.035 4.2 metal4_diel4 PLANAR 2.035 2.13 2.9 metal5_diel PLANAR 2.13 2.35 2.9 metal5_diel2 PLANAR 2.35 2.4 5 metal5_diel3 PLANAR 2.4 2.43 4.2 metal5_diel4 PLANAR 2.43 2.525 2.9 metal6_diel PLANAR 2.525 2.745 2.9 metal6_diel2 PLANAR 2.745 2.795 5 metal6_diel3 PLANAR 2.795 2.825 4.2 metal6_diel4 PLANAR 2.825 2.92 2.9 metal7_diel PLANAR 2.92 3.14 2.9 metal7_diel2 PLANAR 3.14 3.19 5 metal7_diel3 PLANAR 3.19 3.735 4.2 metal8_diel PLANAR 3.735 3.81 4.2 metal8_diel2 PLANAR 3.81 3.86 8.1 metal8_diel3 PLANAR 3.86 4.635 4.2 metal8_diel4 PLANAR 4.635 4.71 8.1 metal8_diel5 PLANAR 4.71 5.375 4.2 metal9_diel PLANAR 5.375 5.435 4.2 metal9_diel2 PLANAR 5.435 5.545 8.1 metal9_diel3 PLANAR 5.545 8.775 4.2 metal9_diel4 PLANAR 8.775 8.85 8.1 metal9_diel5 PLANAR 8.85 9.25 4.2 metal9_diel6 PLANAR 9.25 9.325 8.1 metal9_diel7 PLANAR 9.325 9.575 4.2 metal10_diel PLANAR 9.575 11.025 4.2 metal10_diel2 PLANAR 11.025 11.425 4.2 metal10_diel3 PLANAR 11.425 12.025 8.1 ] PEX MINIMUM PATH WIDTH 0.055 // = 0.06 - .005 DO NOT ADJUST PEX XCALIBRATE VERSION SC v2008.3_34.23 PEX CORNER typical //#define $XCAL_EXCL_INDIE // uncomment this line for no indie tables #ifdef XCAL_EXCL_INDIE #define $XCAL_EXCL_INDIE #endif #ifdef XCALIBRATE_EXCLUDE_INDIE #define $XCAL_EXCL_INDIE #endif #ifndef $XCAL_EXCL_INDIE SVRF MESSAGE "Indie Mode is ON" // indie mode // Source of metal1 in-die table is in: // process/typical/metal1_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.09 0.11 0.135 0.18 0.27 0.36 0.45 0.54 0.63 0.9 1 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.09 0.11 0.135 0.18 0.27 0.36 0.45 0.54 0.63 0.9 1 1.5 2 2.5 3 5 } VALUE(256) = { 0.0075 0.015 0.025 0.0478 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0625 0.0025 0.0045 0.015 0.0345 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0465 0.0025 0.0025 0.008 0.0212 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 0.0305 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0101 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0112 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0123 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0134 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0146 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0246 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0298 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0318 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0319 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 -0.0321 } ] PEX TABLE PIECEWISE RHO_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.09 0.11 0.135 0.18 0.27 0.36 0.45 0.54 0.63 0.9 1 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.09 0.11 0.135 0.18 0.27 0.36 0.45 0.54 0.63 0.9 1 1.5 2 2.5 3 5 } VALUE(256) = { 0.0312 0.0304 0.0295 0.0278 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0297 0.0295 0.0287 0.0274 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0279 0.0279 0.0275 0.0268 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 } ] PEX TABLE FUNCTION THICKNESS_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.1800 Y=width() if(width()<=0.18){ if(width()< 0.0900) { Y = 0.0900 } a=0*pow(Y,4)+3.09985E+03*pow(Y,3)-1.95352E+03*pow(Y,2)+3.68319E+02*pow(Y,1)-2.14321E+01 b=0*pow(Y,4)-3.66012E+03*pow(Y,3)+2.21365E+03*pow(Y,2)-4.04396E+02*pow(Y,1)+2.25973E+01 c=0*pow(Y,4)+1.34735E+03*pow(Y,3)-7.82481E+02*pow(Y,2)+1.38919E+02*pow(Y,1)-7.44971E+00 d=0*pow(Y,4)-1.76936E+02*pow(Y,3)+9.84574E+01*pow(Y,2)-1.69942E+01*pow(Y,1)+8.34368E-01 e=0*pow(Y,4)+3.79327E+00*pow(Y,3)-2.54822E+00*pow(Y,2)+5.07740E-01*pow(Y,1)+3.16873E-03 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.69727E-03*pow(Y,4)+2.15067E-02*pow(Y,3)-4.22542E-01*pow(Y,2)+2.27192E+00*pow(Y,1)-1.21143E+00 b=8.65243E-03*pow(Y,4)+5.04128E-02*pow(Y,3)+9.13719E-02*pow(Y,2)-3.73182E+00*pow(Y,1)+1.98588E+00 c=-1.04695E-02*pow(Y,4)-1.11010E-01*pow(Y,3)+7.58270E-01*pow(Y,2)+1.51980E+00*pow(Y,1)-9.64666E-01 d=7.45410E-03*pow(Y,4)+4.11801E-02*pow(Y,3)-5.36444E-01*pow(Y,2)+5.78776E-02*pow(Y,1)+8.47048E-02 e=-1.88189E-03*pow(Y,4)-3.81512E-03*pow(Y,3)+1.27461E-01*pow(Y,2)-1.96694E-01*pow(Y,1)+7.74912E-02 } X = density() if(Y<=0.0900&&density()>=0.5417){ X = 0.5417 } if(Y<=0.0900&&density()<=0.0300){ X = 0.0300 } if(Y>0.0900&&Y<=0.1100&&density()>=0.5625){ X = 0.5625 } if(Y>0.0900&&Y<=0.1100&&density()<=0.0306){ X = 0.0306 } if(Y>0.1100&&Y<=0.1350&&density()>=0.6111){ X = 0.6111 } if(Y>0.1100&&Y<=0.1350&&density()<=0.0322){ X = 0.0322 } if(Y>0.1350&&Y<=0.1800&&density()>=0.6293){ X = 0.6293 } if(Y>0.1350&&Y<=0.1800&&density()<=0.0328){ X = 0.0328 } if(Y>0.1800&&Y<=0.2700&&density()>=0.7189){ X = 0.7189 } if(Y>0.1800&&Y<=0.2700&&density()<=0.0491){ X = 0.0491 } if(Y>0.2700&&Y<=0.3600&&density()>=0.7727){ X = 0.7727 } if(Y>0.2700&&Y<=0.3600&&density()<=0.0649){ X = 0.0649 } if(Y>0.3600&&Y<=0.4500&&density()>=0.8085){ X = 0.8085 } if(Y>0.3600&&Y<=0.4500&&density()<=0.0801){ X = 0.0801 } if(Y>0.4500&&Y<=0.5400&&density()>=0.8340){ X = 0.8340 } if(Y>0.4500&&Y<=0.5400&&density()<=0.0948){ X = 0.0948 } if(Y>0.5400&&Y<=0.6300&&density()>=0.8408){ X = 0.8408 } if(Y>0.5400&&Y<=0.6300&&density()<=0.1075){ X = 0.1075 } if(Y>0.6300&&Y<=0.9000&&density()>=0.8791){ X = 0.8791 } if(Y>0.6300&&Y<=0.9000&&density()<=0.1475){ X = 0.1475 } if(Y>0.9000&&Y<=1.0000&&density()>=0.8901){ X = 0.8901 } if(Y>0.9000&&Y<=1.0000&&density()<=0.1617){ X = 0.1617 } if(Y>1.0000&&Y<=2.0000&&density()>=0.9417){ X = 0.9417 } if(Y>1.0000&&Y<=2.0000&&density()<=0.2812){ X = 0.2812 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9606){ X = 0.9606 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3710){ X = 0.3710 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9735){ X = 0.9735 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4703){ X = 0.4703 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9839){ X = 0.9839 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5974){ X = 0.5974 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9899){ X = 0.9899 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7040){ X = 0.7040 } if(Y>12.0000&&density()>=0.9899){ X = 0.9899 } if(Y>12.0000&&density()<=0.7040){ X = 0.7040 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal2 in-die table is in: // process/typical/metal2_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal3 in-die table is in: // process/typical/metal3_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal4 in-die table is in: // process/typical/metal4_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal5 in-die table is in: // process/typical/metal5_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal6 in-die table is in: // process/typical/metal6_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal7 in-die table is in: // process/typical/metal7_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0025 0.0125 0.022 0.047 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 0.0535 -0.0035 -0.0015 0.004 0.0225 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 0.0315 -0.0041 -0.0041 -0.0041 0.0099 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 0.0138 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0217 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0284 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.0315 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.032 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.024 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.027 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.039 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.041 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.044 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.045 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.048 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0563 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 -0.0564 } ] PEX TABLE PIECEWISE RHO_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 3 4.5 7.5 12 } SPACINGS(16) = { 0.1 0.13 0.15 0.2 0.3 0.4 0.5 0.6 0.7 1 1.5 2 2.5 3 3.5 5 } VALUE(256) = { 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.028 0.0279 0.0279 0.0272 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.027 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.024 0.0239 0.0239 0.0239 0.0239 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 } ] PEX TABLE FUNCTION THICKNESS_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.2200 Y=width() if(width()<=0.2){ if(width()< 0.1000) { Y = 0.1000 } a=0*pow(Y,4)+2.10985E+04*pow(Y,3)-1.08865E+04*pow(Y,2)+1.82177E+03*pow(Y,1)-9.82452E+01 b=0*pow(Y,4)-2.14466E+04*pow(Y,3)+1.10819E+04*pow(Y,2)-1.84764E+03*pow(Y,1)+9.81205E+01 c=0*pow(Y,4)+6.32589E+03*pow(Y,3)-3.33611E+03*pow(Y,2)+5.63819E+02*pow(Y,1)-2.99329E+01 d=0*pow(Y,4)-6.42598E+02*pow(Y,3)+3.48541E+02*pow(Y,2)-6.01333E+01*pow(Y,1)+3.17517E+00 e=0*pow(Y,4)+1.87126E+01*pow(Y,3)-9.85904E+00*pow(Y,2)+1.74397E+00*pow(Y,1)-4.07352E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-3.76404E-04*pow(Y,4)-1.94241E-02*pow(Y,3)+6.06386E-02*pow(Y,2)-4.01955E-01*pow(Y,1)+3.14193E-01 b=1.01446E-03*pow(Y,4)+7.78809E-02*pow(Y,3)-3.32369E-01*pow(Y,2)+1.28766E+00*pow(Y,1)-1.00899E+00 c=-2.34483E-03*pow(Y,4)-8.17658E-02*pow(Y,3)+3.62475E-01*pow(Y,2)-1.10689E+00*pow(Y,1)+7.89164E-01 d=1.98444E-03*pow(Y,4)+3.53346E-02*pow(Y,3)-1.77375E-01*pow(Y,2)+4.48664E-01*pow(Y,1)-2.88975E-01 e=-1.49130E-04*pow(Y,4)-1.54424E-02*pow(Y,3)+1.17253E-01*pow(Y,2)-3.34923E-01*pow(Y,1)+1.57059E-01 } X = density() if(Y<=0.1000&&density()>=0.5125){ X = 0.5125 } if(Y<=0.1000&&density()<=0.0301){ X = 0.0301 } if(Y>0.1000&&Y<=0.1300&&density()>=0.5500){ X = 0.5500 } if(Y>0.1000&&Y<=0.1300&&density()<=0.0315){ X = 0.0315 } if(Y>0.1300&&Y<=0.1500&&density()>=0.5836){ X = 0.5836 } if(Y>0.1300&&Y<=0.1500&&density()<=0.0318){ X = 0.0318 } if(Y>0.1500&&Y<=0.2000&&density()>=0.5943){ X = 0.5943 } if(Y>0.1500&&Y<=0.2000&&density()<=0.0343){ X = 0.0343 } if(Y>0.2000&&Y<=0.3000&&density()>=0.6790){ X = 0.6790 } if(Y>0.2000&&Y<=0.3000&&density()<=0.0512){ X = 0.0512 } if(Y>0.3000&&Y<=0.4000&&density()>=0.7370){ X = 0.7370 } if(Y>0.3000&&Y<=0.4000&&density()<=0.0682){ X = 0.0682 } if(Y>0.4000&&Y<=0.5000&&density()>=0.7800){ X = 0.7800 } if(Y>0.4000&&Y<=0.5000&&density()<=0.0851){ X = 0.0851 } if(Y>0.5000&&Y<=0.6000&&density()>=0.8229){ X = 0.8229 } if(Y>0.5000&&Y<=0.6000&&density()<=0.1029){ X = 0.1029 } if(Y>0.6000&&Y<=0.7000&&density()>=0.8413){ X = 0.8413 } if(Y>0.6000&&Y<=0.7000&&density()<=0.1181){ X = 0.1181 } if(Y>0.7000&&Y<=1.0000&&density()>=0.8736){ X = 0.8736 } if(Y>0.7000&&Y<=1.0000&&density()<=0.1602){ X = 0.1602 } if(Y>1.0000&&Y<=1.5000&&density()>=0.9119){ X = 0.9119 } if(Y>1.0000&&Y<=1.5000&&density()<=0.2245){ X = 0.2245 } if(Y>1.5000&&Y<=2.0000&&density()>=0.9314){ X = 0.9314 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2794){ X = 0.2794 } if(Y>2.0000&&Y<=3.0000&&density()>=0.9532){ X = 0.9532 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3694){ X = 0.3694 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9678){ X = 0.9678 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4686){ X = 0.4686 } if(Y>4.5000&&Y<=7.5000&&density()>=0.9794){ X = 0.9794 } if(Y>4.5000&&Y<=7.5000&&density()<=0.5955){ X = 0.5955 } if(Y>7.5000&&Y<=12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>7.5000&&Y<=12.0000&&density()<=0.7026){ X = 0.7026 } if(Y>12.0000&&density()>=0.9871){ X = 0.9871 } if(Y>12.0000&&density()<=0.7026){ X = 0.7026 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal8 in-die table is in: // process/typical/metal8_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(15) = { 0.4 0.6 0.8 1 1.2 1.5 2 3 4.5 5 6 7.5 9 10 12 } SPACINGS(15) = { 0.4 0.6 0.8 1 1.2 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 } VALUE(225) = { 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0477 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0204 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 0.0181 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0092 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0126 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0183 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0297 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0469 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0526 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0641 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0812 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.0984 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1098 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 -0.1327 } ] PEX TABLE PIECEWISE RHO_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(15) = { 0.4 0.6 0.8 1 1.2 1.5 2 3 4.5 5 6 7.5 9 10 12 } SPACINGS(15) = { 0.4 0.6 0.8 1 1.2 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 } VALUE(225) = { 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.022 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0211 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0206 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0203 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0202 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.0201 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 0.02 } ] PEX TABLE FUNCTION THICKNESS_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T TNOM = 0.9000 Y=width() if(width()<=1.0){ if(width()< 0.4000) { Y = 0.4000 } a=0*pow(Y,4)-1.01492E+00*pow(Y,3)+1.72050E+00*pow(Y,2)-5.72613E-01*pow(Y,1)-1.91467E-01 b=0*pow(Y,4)+2.03272E+00*pow(Y,3)-3.77043E+00*pow(Y,2)+1.75457E+00*pow(Y,1)+1.09955E-01 c=0*pow(Y,4)-1.37122E+00*pow(Y,3)+2.69420E+00*pow(Y,2)-1.47776E+00*pow(Y,1)+7.55916E-02 d=0*pow(Y,4)+4.05335E-01*pow(Y,3)-8.44339E-01*pow(Y,2)+5.42901E-01*pow(Y,1)-1.18337E-01 e=0*pow(Y,4)-2.95931E-02*pow(Y,3)+6.84638E-02*pow(Y,2)-5.63420E-02*pow(Y,1)+3.45457E-02 }else{ if(width()> 12.0000) { Y = 12.0000 } a=-2.23912E-04*pow(Y,4)+5.27862E-03*pow(Y,3)-4.47700E-02*pow(Y,2)+1.56026E-01*pow(Y,1)-1.94766E-01 b=6.55713E-04*pow(Y,4)-1.50021E-02*pow(Y,3)+1.22907E-01*pow(Y,2)-4.10443E-01*pow(Y,1)+4.82913E-01 c=-7.23008E-04*pow(Y,4)+1.60588E-02*pow(Y,3)-1.26907E-01*pow(Y,2)+4.04383E-01*pow(Y,1)-4.28596E-01 d=3.52904E-04*pow(Y,4)-7.59512E-03*pow(Y,3)+5.76354E-02*pow(Y,2)-1.73513E-01*pow(Y,1)+1.36161E-01 e=-6.55488E-05*pow(Y,4)+1.38183E-03*pow(Y,3)-1.02604E-02*pow(Y,2)+3.03911E-02*pow(Y,1)-9.96561E-03 } X = density() if(Y<=0.4000&&density()>=0.5625){ X = 0.5625 } if(Y<=0.4000&&density()<=0.0703){ X = 0.0703 } if(Y>0.4000&&Y<=0.6000&&density()>=0.6477){ X = 0.6477 } if(Y>0.4000&&Y<=0.6000&&density()<=0.0981){ X = 0.0981 } if(Y>0.6000&&Y<=0.8000&&density()>=0.6837){ X = 0.6837 } if(Y>0.6000&&Y<=0.8000&&density()<=0.1206){ X = 0.1206 } if(Y>0.8000&&Y<=1.0000&&density()>=0.7272){ X = 0.7272 } if(Y>0.8000&&Y<=1.0000&&density()<=0.1454){ X = 0.1454 } if(Y>1.0000&&Y<=1.2000&&density()>=0.7443){ X = 0.7443 } if(Y>1.0000&&Y<=1.2000&&density()<=0.1654){ X = 0.1654 } if(Y>1.2000&&Y<=1.5000&&density()>=0.7828){ X = 0.7828 } if(Y>1.2000&&Y<=1.5000&&density()<=0.1983){ X = 0.1983 } if(Y>1.5000&&Y<=2.0000&&density()>=0.8257){ X = 0.8257 } if(Y>1.5000&&Y<=2.0000&&density()<=0.2477){ X = 0.2477 } if(Y>2.0000&&Y<=3.0000&&density()>=0.8736){ X = 0.8736 } if(Y>2.0000&&Y<=3.0000&&density()<=0.3300){ X = 0.3300 } if(Y>3.0000&&Y<=4.5000&&density()>=0.9088){ X = 0.9088 } if(Y>3.0000&&Y<=4.5000&&density()<=0.4241){ X = 0.4241 } if(Y>4.5000&&Y<=5.0000&&density()>=0.9162){ X = 0.9162 } if(Y>4.5000&&Y<=5.0000&&density()<=0.4498){ X = 0.4498 } if(Y>5.0000&&Y<=6.0000&&density()>=0.9275){ X = 0.9275 } if(Y>5.0000&&Y<=6.0000&&density()<=0.4947){ X = 0.4947 } if(Y>6.0000&&Y<=7.5000&&density()>=0.9391){ X = 0.9391 } if(Y>6.0000&&Y<=7.5000&&density()<=0.5495){ X = 0.5495 } if(Y>7.5000&&Y<=9.0000&&density()>=0.9470){ X = 0.9470 } if(Y>7.5000&&Y<=9.0000&&density()<=0.5934){ X = 0.5934 } if(Y>9.0000&&Y<=10.0000&&density()>=0.9510){ X = 0.9510 } if(Y>9.0000&&Y<=10.0000&&density()<=0.6181){ X = 0.6181 } if(Y>10.0000&&Y<=12.0000&&density()>=0.9570){ X = 0.9570 } if(Y>10.0000&&Y<=12.0000&&density()<=0.6593){ X = 0.6593 } if(Y>12.0000&&density()>=0.9570){ X = 0.9570 } if(Y>12.0000&&density()<=0.6593){ X = 0.6593 } T=TNOM*((a*pow(X,4)+b*pow(X,3)+c*pow(X,2)+d*pow(X,1)+e)+1.0) } } ] // Source of metal9 in-die table is in: // process/typical/metal9_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(1) = { 2 } SPACINGS(1) = { 2 } VALUE(1) = { 0.139 } ] PEX TABLE PIECEWISE RHO_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(1) = { 2 } SPACINGS(1) = { 2 } VALUE(1) = { 0.0181 } ] PEX TABLE FUNCTION THICKNESS_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T T = 0 * density() + 3.4 } } ] // Source of metal10 in-die table is in: // process/typical/metal10_table // Last time-stamp of the above in-die path is: // (Unknown) PEX TABLE PIECEWISE DELTA_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(5) = { 3 6 9 12 15 } SPACINGS(4) = { 2 4 6 8 } VALUE(20) = { 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 0.1775 } ] PEX TABLE PIECEWISE RHO_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(5) = { 3 6 9 12 15 } SPACINGS(4) = { 2 4 6 8 } VALUE(20) = { 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 0.0323 } ] PEX TABLE FUNCTION THICKNESS_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { { PROPERTY T T = 0 * density() + 1.45 } } ] #else // ! #ifndef $XCAL_EXCL_INDIE SVRF MESSAGE "In-Die Mode is OFF" // In-Die Mode is OFF PEX TABLE PIECEWISE DELTA_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 12 } SPACINGS(2) = { 0.09 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0312 } ] PEX TABLE PIECEWISE DELTA_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE DELTA_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.4 12 } SPACINGS(2) = { 0.4 6 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.022 } ] PEX TABLE PIECEWISE DELTA_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 2 2 } SPACINGS(2) = { 2 2 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0181 } ] PEX TABLE PIECEWISE DELTA_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 3 15 } SPACINGS(2) = { 2 8 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RHO_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0323 } ] #endif // #ifndef $XCAL_EXCL_INDIE PEX TABLE STEPWISE NOM_THICKNESS_poly [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.1 } ] PEX TABLE STEPWISE NOM_RSH_poly [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 14.9 } ] PEX TABLE PIECEWISE DELTA_poly [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.06 0.296 } SPACINGS(2) = { 0.12 2.099 } VALUE(4) = { -0.001 -0.001 -0.001 -0.001 } ] PEX TABLE PIECEWISE THICKNESS_D_poly [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.06 0.296 } SPACINGS(2) = { 0.12 2.099 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RSH_poly [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 14.9 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.18 } ] PEX TABLE STEPWISE NOM_RHO_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0312 } ] PEX TABLE PIECEWISE THICKNESS_D_metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 12 } SPACINGS(2) = { 0.09 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.22 } ] PEX TABLE STEPWISE NOM_RHO_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0315 } ] PEX TABLE PIECEWISE THICKNESS_D_metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 12 } SPACINGS(2) = { 0.1 5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.9 } ] PEX TABLE STEPWISE NOM_RHO_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.022 } ] PEX TABLE PIECEWISE THICKNESS_D_metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.4 12 } SPACINGS(2) = { 0.4 6 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 3.4 } ] PEX TABLE STEPWISE NOM_RHO_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0181 } ] PEX TABLE PIECEWISE THICKNESS_D_metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 2 2 } SPACINGS(2) = { 2 2 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 1.45 } ] PEX TABLE STEPWISE NOM_RHO_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0323 } ] PEX TABLE PIECEWISE THICKNESS_D_metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 3 15 } SPACINGS(2) = { 2 8 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_THICKNESS_tndiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE STEPWISE NOM_RSH_tndiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 16.88 } ] PEX TABLE PIECEWISE DELTA_tndiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.08 0.4 } SPACINGS(2) = { 0.06 1.5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE PIECEWISE THICKNESS_D_tndiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.08 0.4 } SPACINGS(2) = { 0.06 1.5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RSH_tndiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 16.88 } ] PEX TABLE STEPWISE NOM_THICKNESS_tpdiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE STEPWISE NOM_RSH_tpdiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 16.1807 } ] PEX TABLE PIECEWISE DELTA_tpdiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.08 0.4 } SPACINGS(2) = { 0.06 1.5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE PIECEWISE THICKNESS_D_tpdiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.08 0.4 } SPACINGS(2) = { 0.06 1.5 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE RSH_tpdiff [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 16.1807 } ] PEX TABLE STEPWISE NOM_N1_poly__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.162 } ] PEX TABLE STEPWISE NOM_N2_poly__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_poly__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 0.09 } SPACINGS(2) = { 0.11 0.11 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal1__metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal1__metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal1__metal2 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal2__metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal2__metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal2__metal3 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal3__metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal3__metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal3__metal4 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal4__metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal4__metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal4__metal5 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal5__metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal5__metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal5__metal6 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal6__metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.015 } ] PEX TABLE STEPWISE NOM_N2_metal6__metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal6__metal7 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.1 0.1 } SPACINGS(2) = { 0.1 0.1 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal7__metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.0285 } ] PEX TABLE STEPWISE NOM_N2_metal7__metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal7__metal8 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.36 0.36 } SPACINGS(2) = { 0.34 0.34 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal8__metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.048 } ] PEX TABLE STEPWISE NOM_N2_metal8__metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal8__metal9 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.36 0.36 } SPACINGS(2) = { 0.34 0.34 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_metal9__metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.369 } ] PEX TABLE STEPWISE NOM_N2_metal9__metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_metal9__metal10 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 3 3 } SPACINGS(2) = { 3 3 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_tndiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.2106 } ] PEX TABLE STEPWISE NOM_N2_tndiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_tndiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 0.09 } SPACINGS(2) = { 0.11 0.11 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE PIECEWISE FRINGE_tndiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 0.09 } SPACINGS(2) = { 0.11 0.11 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE STEPWISE NOM_N1_tpdiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0.2106 } ] PEX TABLE STEPWISE NOM_N2_tpdiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } VALUE(1) = { 0 } ] PEX TABLE PIECEWISE DELTA_tpdiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 0.09 } SPACINGS(2) = { 0.11 0.11 } VALUE(4) = { 0 0 0 0 } ] PEX TABLE PIECEWISE FRINGE_tpdiff__metal1 [ // CORNERS(1) = { typical } CORNERS(1) = { 0 } WIDTHS(2) = { 0.09 0.09 } SPACINGS(2) = { 0.11 0.11 } VALUE(4) = { 0 0 0 0 } ] // This section automatically generated - do not modify // PEX ALIAS poly gate REMOVE OVERLAP PEX IGNORE CAPACITANCE INTRINSIC ALL gate PEX IGNORE CAPACITANCE NEARBODY gate tndiff PEX IGNORE CAPACITANCE NEARBODY gate tpdiff // // Generated on Mon Jan 18 05:33:24 2010 by xCalibrate v2008.3_34.23 Fri Oct 3 09:43:14 PDT 2008 // // Resistance rules #ifdef $XCALIBRATE_EXCLUDE_PROFILE_field #define $XCAL_EXCL_PROF_field #endif // ifdef $XCALIBRATE_EXCLUDE_PROFILE_field #ifdef $XCALIBRATE_INCLUDE_PROFILE_field #define $XCAL_INCL_PROF_field #endif // ifdef $XCALIBRATE_INCLUDE_PROFILE_field #ifndef $XCAL_EXCL_PROF_field #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" 1,"*1G*]WCUAGF`/=&9!>A!!"":VU_&(>NX=:\ZJO+9J$DA!!" >S1[2VW7=.7A8^CP1!!"MB?XTM@F\4"V"'XJ-LX1!!" `8?DE^,PNN\0@<>M4N_Y%1!!">.TF],]+Y@.S2IGRAWT*6@_V9F?[DRL,&EUQ]1V,MO$5JK;+DI873='6-4U&NKH5! >)FECCS?H>=56H5=GNT,#!!!"T_@4^!@UARHE)5!.]_9>+1!!" *T.*FKM:K'_)"3FD%E'FVQ!!"1C)8RCBU0`T7! 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D2ST,#.:6G8NF3=@O*?H5Q!!"@*ANSJ+K0;C1'?*1NE;.^W;--$S<7YR3.V!R49,`-].%YP2![0PNG<,L]#7A>88T/+.=A.H6Q"=G-3^IA.A!!" 0HTN7#7Y\12^7DPP1!!" [R36CB>.D/>YM2K/$]>^RQ!!",@MN@RFVYXJ6QXQ5<*_GE?ID4:W\A!!"OM07.$GG'IV,3M(BAT1VF+%8OAQD#[=L9&G?LNTA]&`=)U#A$[(/6K"E>+R`E[)[! &;3-7>#"%94Z5CWNU72+WQ!!"1`NC4\1!!"OL<\US,">*&*!X]/NF]X(^P/=P,Y.9B"*R`P-,TW=\1!# );XD#H+/8=CO5I2))O)HU!!!"0NF.P(=M^8DNCR[].00>'YOOA*A,O_"%L9-8903_("-0CL9']&;!=(H^<_3:Q#?5'NEII,E7$3(V!8T5T&CXE!!!" @R$+K4@HPW32-$(SD?S\SA!!",F[AM2..HB[)#'HB\Q:6MX0TV)(9N1-<5*/P/<'O"3U!# FW'8GCPZ+X[A!!"0^P[4GY9H5_=G#B\<."*5=`:YXW*UW=^(4;P/Q9B@5]3G'! #'B/,]UXWIYY!VLDT0I(\A!!"=NNT%:\)3@XO6'-'J\_HF86"&1X+]>T0E@!22!M@W$Y!# (LC,`)@F!-Q-%0"<+YI/'A!!"WB-8.229I=4*5HD(!:KL;S(M1X)^HW*[08I.&$&4:\!!# [$TA!,6.EQ##U44%_/HR#A!!"RXN?_ZD\$,8SBYW>N-8#GQ!!" B4XHY+V"-2G29#)^$)HGHA!!"5S@)H,G@#OF\)0^5*Y-F01!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" 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K/5R0<,2WB<'>H<'1_!!!"!H\_7SA<3O)S$E7NBVW6.A!!" ^O"-Q#4B-:(U+XX228=>AQ!!"JI\*]C6;!'WTE2L'"!1T-@'`3#[=KR6X:E2@Z21Y)%9!# 7EL.@Z/2:];8![&#:]L/;1!!"22EK_S^=^DJJJ/^+D-U>/0%0CIB4"BY:H-`]G@;&P@V5U5>Q1$[@A,P,HGS?#]Y4L:'?,`5[I7Q/0=2KJOGWJ'6IL*--!!!"[Q-7.VQ;I3.K0V.0:&ZK.FSDSU5D0GPG"U+(&J).?;!!!"A?J"PWI9E$SO;3".@?E5>-_@K_A!!" GLM(Q!!"78CY3-HJF(\Q-4;AS0,N%Q!!" 8G_=SX2^]POPO"=@KYU6]1!!"(RF$@&D*(PIL3)?#U+JR(P/C9:W`R9\V64\=*BE<4'J`=3;U6>(Q>U,JO28WV79'/^4(K0A^P[95P:G0Z-TH*LDK9Y"^'1D!V"(4AO[9*;:O45^.6-$BY_,O9-R?%TUJ! /WV@ORJRG6?UBLN4SGDU!O:[#$E.BN%A!!"NYL0V$I`4'`=`]7MSQ!GAA!!" =0\2T=UH45^4D0DSAST+)A!!"MC/P6EI%^D=OE+;.MM0E9^)!^E47B&>"ROW%1@^N84Q!# DAM8#E&N?.X!<\?&1"#/GQ!!"O2X\6%8Y1*,;E1+Z!^0G`=_;2"O[IHV\XAQ!CO5R*1UN%/OQ]FOCT#R+M9-3TU"/1@1-MGO%\6&95J! ES$L0,`\:,"NQ8&$W#W1K1!!":%K8D*V?\6/>W0$H-U+:6K4#6_N?_IIR#H^SSV5#CX]!# FIR<8_#LZ(LFSR:@%A"*+Q!!"<_G.RTI2HP!S<2"_3[@2W=)(#"LS.$7;<[:YU8.!Z/WJW.\>8E>ZJE7H8K0ZEY1N].MN)A!0I:=:=EE(! 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(C<0RZ6<7$?B/Q"FBT1)LO(P:-;N/TA!!"31/+RO[7_(WE2*>D,P/X! _#-7Z'=HG1#L_%*6-_T%]Q!!")@423C4F(^P&_<.?;^"R>*JA:TUL:^**JSC:)KXTFAW5:C.VU*NQ(N\T#=+3SE>M'3*4!2NQ!!")NHB=6R/JM?EF[6OL^\2K_(!&$QPZ5HLDQEQ_#SI4KU!# 9F%%6O@(7L?#W7E59BWCQ!!!"TD2(&3`0N"RZ50?RK"":<]R(K#0"RBT8D=%;44=4GE>FP=6PO=LI\L@`EFS.H9;4! \G8#;HMY97GJK1=V(&NV[!!!"?!O04S`E932'#P2#%RQJ4\.-7SRX&&?Q_MV*X^0".S)!# ,^F=*TFZ!=-+CT2\CQ'&$A!!"4R-Q(DN(FL8H,J7/$ZDDO_(9Q]E[*H9D0K]!V:'W4BQ!# -#!9*1L=J6\A^&W@!P\BJQ!!"B0H,1DD.)BZ-Q!T-5/BEQA!!" -A+D?!ZC7-5>-_@K_A!!" 6*MA<.$K'M+5@<8BG?DWO!!!"2$LU(NY!);`(#+^4L=^TTA!!" :>S6]T6ZYPXV<+%:OD:6K1!!"#^LE2/"ZS6M;U)+`TO$VW!NLJ[@_@U?#@7%I\\B7M?4?Y/FL1'M]6P):Q]%[9.-ZK40V&OWN]-:L!56_`=HY:I[U,$/N[D-7;#QNGE*/KK:HT.D7A3;7W;FBCW-I[>U\! EW*AHPY;VFE$4:I8X/1"-A!!"D^)\##:-RK$OA8]^`END$Q!!" $4=,I2I$?`':54N^3/5$7A!!"@%UU),;A[6_FWC>8P3BQ":._ZK@@`?Y?K!N"_IGZO*`PQ>D6V^?ZFXP2V=&Q!!" 0,?MS[3'6[@;WB94AC#LV1!!"A%OQ.0.=&P6I^N1/M9-&&1!!" 4]S%>+-A]&5N32"X(T'+G!!!"K!#Q^RN2!I1"EP=]Q8SDB2_/! ?02ZD-9N7%8F`>""N6UHIA!!"T<*?(LO;[GC$YY%.C.4)$@435AO2B^5\Y.$2\A8PH/A!# 6.7-]GT_EC,W?NE$JE3/`A!!"Z]A:=Z@AZX6;V2+"HV,22=)M'<7L$Z!#!WUP]M/6-\U)/#KUED<,"@J:8RV10@:WIU!,6C!!!" S)FXWB1[@^[_#T7E\DJ[?1!!"HO_K[&)!@=/4#Z8V&-%<*/PC-/]KV*CW`DIHV-$7(]=!# O4IN2E`\(V).U#L\!0K-=A!!"-`C9&.5'+@(W2-!# 7`8A^R%6ME9`KCXBK00`"!!!":N,V_`B8*^:DM/,+;E20"Q!!" ZWD;(V5I`=,VBHXH@*RJAA!!"_K.Z;Q+1$VW"`Y6SV[3M-Q!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" :>7IUG1[!^OBEB_GZ_.7/Q!!"[@/(!\D?.D14]EP="HQ!!" !IEBG'$7P`BX?:@T'7.1EA!!"-:=-O>N.IFDIIHK_5C\?38)II6O*1>H(E$\WIB_C-BF0K=0=_EM'U/QJ?'>T14V2S;.X\W!)Q`'M`SVMXB$[PAOHN^AIP#4"7XG6[,\T"UP2D55V.E/"KH;1F;5!0N2!! "5@@N:S+:&9&[?@+805#P1!!";!83@;<&;X82#7IH'.H-1Q!!" WTEL\A#X)O>/@)]=;O<4;Q!!"+P/\2Z!T,+PJR,=EG'B3KE;R8W>3_#X\1TS15)]*FBL&-\:;G0D+]`GRBY!>4(_31]P;',K*D&S_I%P=)H5Y$1!!" 5O[NQP0$*DZF?%F5P1!!"[T;JL,"7&)CD8F#:BI0:%R]OJ)ME[5`N9&.[F*]]>(M!# NX+"XDS0]Z/9(R9V]'(X]\=O^!N"GA9IM*(V"I;=!# EQKYKCFC=(3-S)^K5L,F]+'%WD]YYOLOVCJF6G2K+/(I*:,PXHYDL3*#&\>WS6U5!!!" KR^>ST+H,C)8557!+*A)`!!!"LM&5S"&DKQHP2S=3*#9I]Y^F->[%H%$B!!!"SH,#Z'CP8QTDY[`X5[4R`K66%C6L;)FN\187?>/$K:.[E:,K!3YO<["LVZJ!`P2]! ]*?0$/*S>NT>9]/EG&]+Y!!!"(8_5)%8HYO^J<1E"3D_O%=X1ME*DK(V3TBKN@')>C(-!# 0,P4]X]JIYH.I&#MG7\0MA!!"S#I2\0*E',;L>F(($SC3G!EKQ#1Y@;OS=^X'H`MWOA!!" :T`G#EI;:J9FD>[NIZ:!O!!!"!+K-/I9-6_=!JK@8>Q0#>!!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" B+,G6W9]9R'0UZM=`JU1=Q!!"+3Q.K93=J\Y8`,6EACS*GQ!!" .4\[.,#W+S*/#7]-Y`3!IA!!"ZQ;Z6NC0GZJ-&N;1_G;V-*1WE(E)L#7C-%19TM+O@(,U*F96D!\]S89`E9Z! TO_2!4,\O-/ZDA&48OM,VA!!"C"@,\[Z?LQDF1?)8/>4LD1!!" POBY0Q6&_&3J1*FTKJFLIA!!"`DFF6N?%9F>903W`N'0'409;*8!KZ]OPQ^W*D&QIT$B1(;"FF/USCFTK+]+(WW\PZG(M[*7_$+!9RZ+,GR9Z'Q!!" +P3ZLHU!83N3@5\S)EP;WA!!"QW<5YO&,]X0W+>SZ$`U*JQ!!" *!\*U183^53&CFMX\%3<(A!!"6#;BZ6I9%Q\W%U'$KL]6U%&>(.+4Q+H>7X-_@"A8369!# 9LIK_Z=U".IY,'4].L\UY!!!")61%$$>=KN_^]K*)B5Z-MR>@W0XOS]Y%E;);/$!?^[.KU*%<76NCB7I#P^4\\LYB! X6=U3G)3;'4Z.Q.J40FTDA!!"\9V$J@&]]JU-+H6PIB[2\:EV:FW;9W/X*RY@P,VWL,PE7ZGFTV_(;O3*E09//4W;! NKC&PF&R_*I'6W8*+#'=91!!"KK9!.Q`!BWF'*$(D4N.I-Y8-%]OD,I;NB$.=$5AF?=U!# VRH&JO'&D(<=;3!1=T=2;!!!"+K>:LW]2Z,$;&+,H&0-D#+']]/]IPIB7Q!!"[+'(BT!SXMDFU;KM]9ND]4`#=Z+N,2'+!TQ&:R(?NTS8W81-J$\:EF3M+B_4T=V0! Z"N?LUZ+0$?D['C1A1!# BE-M,&,."44GVX1+PB.LI!!!"/)W`#D4*?>0^:!SBF0.09Q!!" 7`:1K<43?3`E+H)R%A+#C!!!"5^`A+\WYU.L<6R5-/9FI71!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" PX`$"ZMUY]2%;Y_C6DIB!!!!"(B.:O_"M,K[A'!V*$V-@U!!!" V.%-[-EQ"X@E7D$[`'Z36!!!"4(UOR'UHP2(C!1=^5*`+?SD?L>KH4#-\:PZ[`P3&!E/-,N4UB7H`OQ)=0UB8]HY!V.=])_@.:T;=5X9JU^J+TZ2&;`(,2BS6UQR_JU1LWF84*?.7#!J`K)@6GNABE($I! #!>S7E16H%>+P4ZH[QN;:A!!"U=$M]FRO1CVXMCGTMKW3$1!!" @#/%)]K>":VAY^PE7*\&:1!!"]TS(M$_#`!7'V92"]\SSBB&"AS1>U3-'"NTJ1T8:\_DX4G>U_7$Z9S?:5UD#/:4#5_^V.OP;/;#[O^#S7^;G8A!!" #(0685>("S-NKDL&#_D+UA!!"CM-`-FWL2EZ+NYFBYGX"UQ!!" OCN.%OC2;.U7"5!Q3SHYWA!!"7K_:VYG6B\0A9'NX%S\)TUC7B?5'#Y=1.0AF,GYSKEI!# >."ZT-$:![9]J\>U'S\?E1!!"EU*M=Q-ECO1G+%F?R4=#R3/R(+EG;(RM*Z4@;I);(KFHDQO-LEJSL,1J8].:DL6:! /8/EW@%C#04NSI)'VP\I=Q!!"2ON/E;C#+Y2"H(/38^-2W=C2;A?JM&N":/,:E9E?ZR,LW(*P=GN5=!-D4L.8@#F$! %,?.+:H\DXXE.^MA9PW@[Q!!"X2IKA_W=='RUD`=3\)3#)3H:$PNW2MIF,(5M33;#U%E!# D^N3(C4%W6JK76\UM`Y,8A!!"&%@GAPUYSE42Y^O=SP#?/)"BUS[=Y$4J,@:Z*!B:5Q>.>23WI._2DH/C(8.18F!%7>G%RV4N!\L:(^6_IU_>*A!!" ;G,#R!T$9H&!9%WPN%8^[1!!";[+9J3#^S*U+L1/^6`C#]93LX(MI!WH/\G'OF,R8G9]!# .D'Y&-@LN4OHTEQG1O?#KA!!"/EL3SRD8L#N+2IZ1U*8/A%&EKO;RM^Z#3/#YHJ7*R>"*_C.EUG;OTSO9P&G14SN`! 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AN?.$"LRH3FX=]>[84[4>Q!!"5-2-_.K+`&-FLIID^Y!G81!!" <*M@"=J:YW-\CPJP:,P@H?*#Q4;O"20^1#LQ!!"*P)"]:]L:EML5-K*?:IJA1!!" =TGL=80M5-FD_0]\A]WBGQ!!""[D9%0C4XRLSCJ*C(V<^C:W]G^&)+PV!-]IY$RR5N1ORF\5X9);']%VX_CQQ"U(]9YB^^\MAYN6<9=!COR.B7Q!!" 5$7X0"@7"U_%-R&+Z6U:/A!!"GN:Q<+&?3"6ZWC@Z771_2A!!" T$:6!=Q%_)8.$Y6(=HO'_A!!"(=7(3RNA#AU3Z#09Q;W*Z*TB0J!>,+JK]U:;O1`G+^C! Y#=YK;K0PQ%&=#*)M@L291!!"\))>%_1">-Q96F[K67*]]Y4#TII5_;HS;N_9:(I$3B/HDVIUN:ON:BS=I>/%QGI;**X>=*#GAH$JELZ1*WV!MQ!# Y9/-O[@H1/UXA6.N_WE^=!!!"OV%/^@KS)3*$TPW.R23=BRP]-$A'!9)8MN)HB^+XM*=Y!)D^_2_"C<('[;"\W-Y3.-.9?8ZFE\M3K@NB1]4!,1!!" "=Q55>A%'E?;"1S=VJU9X7A'TW-@$6Q!!"2/'XT3KE/X;M?1OFW$.MBU]!# .;?C;BQ/)*KC\5Z()31@"Q!!"F9.:7\#Q#0.MOTWB%N)<@CI!# ?&@GY/AIHMF9Q3&,&4[-DA!!"2Z99`)5HI^E$3[6YO0M.X1!!" 7C\4:(M8NH7D0S%RT>0O;1!!"L#IG",[JBQ9X1'!C.;\P\Q!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" 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[7DYK<^`4`#.P+XZD_7-:1!!"T6_E2WU`Q:X"9A"^&8#UJ33X?^S`K[0OS?<\Y"(MC3"P[G[;V@RK)6X"):P$=*ZC! @PS]52VAY-/MXX";%M&.\!!!",5.#@N&!Y>TJM!9AE$\.*6U%"YGVBLN4H`.0@=)^=_ZHBF=YDPWG;4[G-@=F;N/61W%=S7%X0GWU$$OC=3E6X5T-L=NJ]_!88(W(F6'MZ_'B+J@99JG<(G<$<8-[X6+':T6XMM^Q8+]G<;X,S+GBT;=SN+7.(34(`KX$9>^/3W*2P6EF/A!8I\Q1#6<%Z>`_NDI`0:;K@&>L1[@F40"+:6A6[#9F(-S! G6MSTM+'\I0Y[=G_/7*0KA!!".ZX*5.;[X?C-4G7L?E$W^J4`,"1B**&F\W4(9!# ;"*2MHGQ[@R6;GC8I41]]!!!"^5@KIWLP:MO**/YQ!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" 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D8(4:A@@#C?&5_#L=:X=J!!!"-':RYT^A4,H;=#<8^U="/M*^0B])W5Q-5K%!# BV$"5=!-%JFAVK$>HEM^E2[N7HAE+3<=^=(L!R6-,_YCB)^["=65!:!B4HQ"/VU&'QN*6J,S;LVD`['[3,S!!!" -?"/W69:<6*>)N,X?)CAU!!!"?G':QA(6S8T*N#39-A!$QCO=^!?L5L@^">8/*1!!"I07)Q7CBW+'G0KQ49D,B(4()2>6B]/7H:;%MHGSVTU/-1P/'?]I!,^TR`87DG*=,@),'(7D5E@Y8Q6P@TCI6^`C\?-],A9!# U:;8"FME`L5U`,'2VHU7[1!!")"H]SS,2](Y+../(*G69'A!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" ^D*^$W.=Q%:2/TEGIFPZ(1!!"`>AJHQ1<,0)#KZH\A:#YS!!!" D2@((_!XG,*VN>H2!R8G,!!!";K!7-?<:].+M"C(3SL/X05WU+<(MMBO:*YX8=T1:PS\OJ!/>4MZ,$OG;Q=.9)T7#$E*!!!"BZ,20%G*6QNZH!;SO&FP<1!!" HX50#%.&?@K1-&U(F4'4WA!!"2W\F^5!%79OZ@`H_&2O8]RS%K1$M0T7ODVV`G_TPA=-J#JZ*[="E.+>$;1@RZ.;:@,$6.U;1!!"7TL;4%KJ&<=#+1+)6J:$VA!!" =ADQ8%G2;(!UB#S(B\0I4!!!"H(/`0R$>X4N/0[-3XJ4V^YPDS8C47Y'CC=30`\83H2Y!# >:F.)]CT="GAW+2;.U$A$1!!"&^:T_^)'#PY! 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S[*';&+!>CJO%.,L,?M2S!!!"3KJG+U@`IH^H+]5I$%773`;*NW<&/06WIP,CI`DF(RJ)3'^DX(+[?[X04EG)+X9V%2>C@_K>5UK6R*=0K`"L*EV`+'\5ZQB@"CM.J74L2ILA#ULSXS5ZWKPX8P-+D5UH! 86:!GS_M7J(6AY68ZYLZ,!!!"&&;@I:!^Q)T$LY4IC&;/JDF58*\Q]'4/;#U&DX6`-1U!# [#8_;6%<[31!!" #ENDCRYPT #DECRYPT %8:~T4:(;2TYP.7RP`XPJTY\$N`19W9'T2Z!G3I8/W&Q&CY!#T8PE;82*9\FFP>5>-_@K_A!!" K3'^P(=H!<&I9]$V$ZI^N1!!"ILNM1X()ATO.?O>Q9BIF[!!!" =8A9M*!SQ2SL[?$*"X61G!!!"+-\]X`V'=ZR8J@B=*T?502MQ*S4>.*+G662(=>DR:DB1>TVSQ]=NOFE[_K&,?:'M`:>A!!" D:X@H21ME<+TAEYH)O.C1Q!!"0FEU4"JA1SJ<`-7C0KBE(52VZ4T;TDS)J+FMPQAF94-!# +=1-><&\*TDXY]*AR[.`(A!!"SLW?2_U]H3BG-#(W1+O!`#2RN/8/I:D&P$9LL#DH8:"<*LH!A-(Z5`(-@8CZLGJK! ;*W%/-_T$0'C3-+K'#DPX!!!"(+/N]Z`84V.MN>\_D4JOB&+0R!)@.KBOC^S!>`^L/5[CZ9D%$"I*!V\YE`5G8&@/UY4A=B"PE!#>A7'A"P`N>A!!" ATYY)KJNC-PKV)W4E&N*11!!"CI+\'X"?>>8V]9#+[WB`5]'W6B*L1^WFGFN2E(5+:1!!"*Z_1E?E]AS,Z&OT4;JMN6.2;FF0."QF&SHFX['H3ZFNR-KUH!#R5%HDK/+J! 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